Microscope slide, method for manufacturing microscope slide, observation method, and analysis method
It is not preferable to use a material other than materials that are used in the related art in order to prevent a section from peeling from a microscope slide. This is because, even if adhesiveness is improved, it is necessary to eliminate influence on processes such as dyeing. An object of the invention is to provide a technique for preventing a section from peeling off without applying an additional material. In the invention, the above-described problem is solved by etching at least a part of a region of a surface of a substrate with reactive ions.
1. A manufacturing method of a microscope slide comprising:
a first step of preparing a transparent substrate having a surface on which a colored resin film is partially formed;
a second step of etching a first region that is at least a part of the surface of the substrate on which the resin film is formed, by etching with reactive ions etching a material of the substrate to introduce a surface shape including convex portions at a higher density than 25 per 1 μm 2 in a plan view;
a third step of ashing at least a part of the resin film and the first region with oxygen reactive ions after the second step,
wherein coloring of a part of the resin film to which ashing with the oxygen reactive ions has been performed is lighter than coloring of the resin film when viewed from a side opposite to the surface including the resin film.
2. The manufacturing method of the microscope slide according to claim 1 ,
wherein a biological tissue section attached to the first region is prevented from peeling off without applying an additional material.
3. The manufacturing method of the microscope slide according to claim 1 ,
wherein, on a surface of the first region in the second step, the etching with the reactive ions progresses more in a recessed region being a groove between the adjacent convex portions than the convex portion.
4. The manufacturing method of the microscope slide according to claim 3 ,
wherein the substrate is a silicon oxide substrate,
the reactive ions of the second step are obtained by introducing gas containing fluorine-based gas, and
in the second step, the surface shape of unevenness irregularly filled with the convex portions is introduced by introducing surface roughness including the convex portions to a surface of the silicon oxide substrate.
5. The manufacturing method of the microscope slide according to claim 1 ,
wherein the substrate to be prepared in the first step is a glass slide, and
the resin film is a frosted portion.
6. The manufacturing method of the microscope slide according to claim 5 ,
wherein the first region is provided in contact with an edge of the glass slide.
7. A manufacturing method of a microscope slide comprising:
a first step of preparing a substrate;
a second step of etching a first region that is at least a part of the surface of the substrate by etching with reactive ions to introduce a surface shape having convex portions at a higher density than 25 convex portions per 1 μm 2 in plan view,
a third step of ashing the first region with oxygen reactive ion after the second step,
wherein, on a surface of the first region in the second step, the etching with the reactive ions progresses more in a recessed region being a groove between the adjacent convex portions than in the convex portion.
8. The manufacturing method of the microscope slide according to claim 7 ,
wherein the substrate is a silicon oxide substrate,
the reactive ions of the second step are obtained by introducing gas containing fluorine-based gas, and
in the second step, the surface shape of unevenness irregularly filled with the convex portions is introduced by introducing surface roughness including the convex portions to a surface of the silicon oxide substrate.
9. The manufacturing method of the microscope slide according to claim 7 ,
wherein a biological tissue section attached to the first region is prevented from peeling off without applying an additional material.