IP Library › Granted Patent US 12,042,902
Granted Patent B2
US 12,042,902 · App. 17/455,959 · Granted Jul 23, 2024

Force measurement system

Inventor: Zhengxian Zhang (Hefei, CN)
Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
B24B49/10B24B1/00G01L1/26G01L5/0076H01L21/67092H01L21/67253
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Quick Facts
Patent No.
US 12,042,902
App. No.
17/455,959
Granted
Jul 23, 2024
Kind
B2
Abstract

Force measurement system is provided. It includes: a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm; a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base; a deformation sensor, configured to detect deformation of the elastic bodies; and an analysis device, configured to obtain the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic body.

Claims (37)

1. A force measurement system, comprising:

a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm;

a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base;

a deformation sensor, configured to detect deformation of the elastic bodies; and

an analysis device, configured to measure the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic bodies;

wherein the stressed layer has a center of stress; and in a direction parallel to a top surface of the stressed layer, there are at least two of the elastic bodies having a same distance from the center of stress; and

a groove is formed in the stressed layer, the groove being configured to receive a calibration weight, and a center of the groove serves as the center of stress.

2. The force measurement system according to claim 1 , further comprising: a grinding disk, fixed on the grinding arm, the grinding arm applies the force to the stressed layer through the grinding disk.

3. The force measurement system according to claim 1 , wherein the stressed layer comprises a grinding pad.

4. The force measurement system according to claim 1 , wherein a number of the elastic bodies is greater than or equal to three.

5. The force measurement system according to claim 1 , wherein a center axis of one of the elastic bodies passes through the center of stress.

6. The force measurement system according to claim 1 , wherein the analysis device is further configured to calibrate a plane position and orientation of the grinding arm, according to a difference of deformation between the elastic bodies.

7. The force measurement system according to claim 1 , wherein in a direction perpendicular to a surface of the stressed layer, orthographic projections of the elastic bodies are entirely coincident with an orthographic projection of a grinding disk.

8. The force measurement system according to claim 1 , wherein the elastic bodies have a same specification.

9. A force measurement system, comprising:

a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm;

a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base;

a deformation sensor, configured to detect deformation of the elastic bodies; and

an analysis device, configured to measure the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic bodies;

wherein the stressed layer has a center of stress; and in a direction parallel to a top surface of the stressed layer, there are at least two of the elastic bodies having a same distance from the center of stress; and

a center axis of one of the elastic bodies passes through the center of stress.

10. The force measurement system according to claim 9 , further comprising: a grinding disk, fixed on the grinding arm, the grinding arm applies the force to the stressed layer through the grinding disk.

11. The force measurement system according to claim 9 , wherein the stressed layer comprises a grinding pad.

12. The force measurement system according to claim 9 , wherein a number of the elastic bodies is greater than or equal to three.

13. The force measurement system according to claim 9 , wherein the analysis device is further configured to calibrate a plane position and orientation of the grinding arm, according to a difference of deformation between the elastic bodies.

14. The force measurement system according to claim 9 , wherein in a direction perpendicular to a surface of the stressed layer, orthographic projections of the elastic bodies are entirely coincident with an orthographic projection of a grinding disk.

15. The force measurement system according to claim 9 , wherein the elastic bodies have a same specification.

16. A force measurement system, comprising:

a grinding arm and a stressed layer, the stressed layer being configured to bear a force from the grinding arm;

a base and a plurality of elastic bodies, the elastic bodies being fixed between the stressed layer and the base;

a deformation sensor, configured to detect deformation of the elastic bodies; and

an analysis device, configured to measure the force on the stressed layer according to a detection result of the deformation sensor and an elastic constant of the elastic bodies, and further configured to calibrate a plane position and orientation of the grinding arm, according to a difference of deformation between the elastic bodies;

wherein the stressed layer has a center of stress; and in a direction parallel to a top surface of the stressed layer, there are at least two of the elastic bodies having a same distance from the center of stress.

17. The force measurement system according to claim 16 , further comprising: a grinding disk, fixed on the grinding arm, the grinding arm applies the force to the stressed layer through the grinding disk.

18. The force measurement system according to claim 16 , wherein the stressed layer comprises a grinding pad.

19. The force measurement system according to claim 16 , wherein a number of the elastic bodies is greater than or equal to three.

20. The force measurement system according to claim 16 , wherein in a direction perpendicular to a surface of the stressed layer, orthographic projections of the elastic bodies are entirely coincident with an orthographic projection of a grinding disk.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 22, 2021
From: ZHANG, ZHENGXIAN
To: CHANGXIN MEMORY TECHNOLOGIES, INC.
Reel/Frame 058177/0823 →
Priority Claims (1)
CN 202011414407.0 · Dec 3, 2020 · national
Continuity (2)
Continuation PCTCN2021103798 · Jun 30, 2021
Related Publication 20220176515A1 · Jun 9, 2022
Cited By (1)
US 12,379,277