IP Library › Granted Patent US 12,046,623
Granted Patent B2
US 12,046,623 · App. 17/395,794 · Granted Jul 23, 2024

Compound semiconductor x-ray detector tiles and method of dicing thereof

Inventors: Francis Joseph Kumar (Victoria, CA); Michael K. Jackson (Victoria, CA); Pramodha Marthandam (Victoria, CA)
Assignee: REDLEN TECHNOLOGIES, INC.
H01L27/14659A61B6/032H01L27/14696H01L27/14698
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Quick Facts
Patent No.
US 12,046,623
App. No.
17/395,794
Granted
Jul 23, 2024
Kind
B2
Abstract

A radiation detector tile includes a single crystal compound semiconductor tile having a zinc blende crystal structure, a (111) plane first major (i.e. prominent) surface and four side surfaces which are rotated by an angle of 13° to 17° to a {110} family of planes. The tile may be formed by dicing a (111) oriented wafer at directions which are rotated by an angle of 13° to 17° from <110> in-plane slipping directions to reduce or eliminate the side surface chipping and sub surface dislocation defects.

Claims (20)

1. A radiation detector tile, comprising a single crystal compound semiconductor tile having a zinc blende crystal structure and having a (111) plane first major surface and four side surfaces which are rotated by an angle of 13° to 17° to a {110} family of planes.

2. The radiation detector tile of claim 1 , wherein the tile comprises single crystal CdTe or its iso-valent alloy.

3. The radiation detector tile of claim 2 , wherein the tile comprises single crystal cadmium zinc telluride.

4. The radiation detector tile of claim 1 , wherein the four side surfaces are rotated by an angle of 14° to 16° to the {110} family of planes.

5. The radiation detector tile of claim 1 , wherein the four side surfaces are rotated by an angle of 15° to the {110} family of planes.

6. A radiation detector, comprising:

the radiation detector tile of claim 1 ;

at least one anode located on a major surface of the radiation detector tile; and

at least one cathode located on another major surface of the radiation detector tile.

7. The radiation detector of claim 6 , wherein:

the radiation detector comprises an X-ray radiation detector;

the at least one cathode is located on a (−1−1−1) plane major surface of the radiation detector tile;

the at least one anode comprises a plurality of anodes located on the (111) plane major surface of the radiation detector tile;

the X-ray radiation detector comprises a plurality of detector pixels; and

each detector pixel contains one anode of the plurality of anodes.

8. An X-ray imaging system, comprising:

a plurality of X-ray radiation detectors of claim 7 ;

an X-ray source;

a bias power supply; and

a control unit configured to apply a voltage from the bias power supply to the plurality of X-ray radiation detectors.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 15, 2021
From: KUMAR, FRANCIS JOSEPH; JACKSON, MICHAEL K; MARTHANDAM, PRAMODHA
To: REDLEN TECHNOLOGIES, INC.,
Reel/Frame 057493/0463 →
Continuity (2)
Provisional Application 63062625 · Aug 7, 2020
Related Publication 20220045118A1 · Feb 10, 2022