IP Library › Granted Patent US 12,050,347
Granted Patent B2
US 12,050,347 · App. 17/751,777 · Granted Jul 30, 2024

Vertical polarizing beamsplitter for photonics

Inventors: Tai-Chun Huang (New Taipei, TW); Stefan Rusu (Sunnyvale, CA)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G02B6/2773G02B6/1228G02B6/124G02B6/126G02B6/13G02B27/285G02B2006/1215
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Quick Facts
Patent No.
US 12,050,347
App. No.
17/751,777
Granted
Jul 30, 2024
Kind
B2
Abstract

A photonic polarizing beamsplitter is disclosed. The beamsplitter comprises a first waveguide, a second waveguide located above the first waveguide, and a birefringent coupler between the first waveguide and the second waveguide. The birefringent coupler has an effective refractive index for a TM mode which is greater than a refractive index of the first waveguide, and an effective refractive index for a TE mode which is less than the refractive index of the first waveguide. The second waveguide comprises a plurality of outwardly tapering legs with a gap between adjacent legs that are connected downstream to a body. The vertical beamsplitter uses less surface area.

Claims (32)

1. A method for making a photonic polarizing beamsplitter, comprising:

forming a first waveguide in a first optical routing layer on a substrate;

forming a birefringent coupler above the first waveguide from a birefringent material; and

forming a second waveguide in a second optical routing layer on the substrate above the first waveguide;

wherein the second waveguide comprises a plurality of outwardly tapering legs with a gap between adjacent legs that are connected downstream to a body, as determined when light is sent into the first waveguide.

2. The method of claim 1 , wherein the plurality of outwardly tapering legs has two legs or three legs.

3. The method of claim 1 , wherein a distal end of each leg has a width of 5% to 95% of a width of the first waveguide.

4. The method of claim 1 , wherein a proximal end of each leg has a width of 5% to 95% of a width of the first waveguide.

5. The method of claim 1 , wherein each gap has a width of 5% to 95% of a width of the first waveguide.

6. The method of claim 1 , wherein a downstream end of the body has width of 30 to 300% of a width of the first waveguide.

7. The method of claim 1 , wherein the first waveguide has a width of about 0.1 micrometers to about 20 micrometers, or wherein the first waveguide has a length of about 1 micrometer to about 50 micrometers.

8. The method of claim 1 , wherein the second waveguide further comprises an inwardly tapering head downstream of the body.

9. The method of claim 8 , wherein a downstream end of the head has a width of 30% to 300% of the first waveguide, and wherein the downstream end width of the head is less than a width of a downstream end of the body.

10. The method of claim 9 , wherein the head has a length of about 1 micrometer to about 50 micrometers.

11. The method of claim 1 , wherein the second waveguide is in the form of a Bragg grating.

12. The method of claim 11 , wherein the Bragg grating has a grating period of about 50 nanometers to about 600 nanometers.

13. The method of claim 12 , wherein a proximal end region of each leg includes a quadrilateral feature.

14. The method of claim 13 , wherein an upstream end of the quadrilateral feature has a width of about 10 nanometers to about 300 nanometers.

15. The method of claim 12 , wherein the Bragg grating has a spacing of 1% to 99% of a grating period of the Bragg grating.

16. The method of claim 1 , wherein the birefringent coupler has an effective refractive index for a TM mode which is greater than a refractive index of the first waveguide, and wherein the birefringent coupler has an effective refractive index for a TE mode which is less than the refractive index of the first waveguide.

17. A photonic polarizing beamsplitter, comprising:

a first waveguide;

a second waveguide located above the first waveguide; and

a birefringent coupler between the first waveguide and the second waveguide;

wherein the second waveguide comprises a plurality of outwardly tapering legs with a gap between adjacent legs that are connected downstream to a body, as determined when light is sent into the first waveguide.

18. The beamsplitter of claim 17 , wherein the birefringent coupler comprises hafnium oxide, zirconium oxide, aluminum oxide, hafnium silicate, zirconium silicate, hafnium oxynitride, zirconium oxynitride, silicon oxynitride, boron nitride, or silicon carbide.

19. A method for separating TE-mode wavelengths from TM-mode wavelengths in a photonic device, comprising:

sending an optical input into a first waveguide, the optical input comprising the TE-mode wavelengths and the TM-mode wavelengths;

passing the optical input through a vertical overlap region that includes a birefringent coupler and a second waveguide above the first waveguide, wherein the second waveguide comprises a plurality of outwardly tapering legs with a gap between adjacent legs that are connected downstream to a body;

receiving the TM-mode wavelengths in the second waveguide; and

retaining the TE-mode wavelengths in the first waveguide.

20. The method of claim 19 , wherein the body has a length of about 1 micrometer to about 50 micrometers.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 24, 2022
From: HUANG, TAI-CHUN; RUSU, STEFAN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Reel/Frame 060165/0209 →
Continuity (1)
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