Three dimensional (3D) vertical spiral inductor and transformer
Disclosed is apparatus including a vertical spiral inductor. The vertical spiral inductor may include a plurality of dielectric layers formed on a substrate, a plurality of conductive layers, each of the plurality of conductive layers disposed on each of the plurality of dielectric layers, a plurality of insulating layers, each of the plurality of insulating layers disposed on each of the plurality of conductive layers, wherein each of the plurality of insulating layers separates each of the plurality of dielectric layers. A first spiral coil is arranged in a first plane perpendicular to the substrate, where the first spiral coil is formed of first portions of the plurality of conductive layers and a first set of vias of a plurality of vias, configured to connect the first portions of the plurality of conductive layers.
1. An apparatus including a spiral inductor an inductive device, comprising:
a plurality of dielectric layers formed on a substrate;
a plurality of conductive layers, each of the plurality of conductive layers disposed on each of the plurality of dielectric layers;
a plurality of insulating layers, each of the plurality of insulating layers disposed to separate corresponding two adjacent dielectric layers of the plurality of dielectric layers;
a plurality of vias;
a first spiral coil arranged in a first plane perpendicular to the substrate, wherein the first spiral coil is formed of first portions of the plurality of conductive layers and a first set of vias of the plurality of vias, configured to connect the first portions of the plurality of conductive layers; and
a second spiral coil arranged in the first plane, wherein the second spiral coil is formed of second portions of the plurality of conductive layers and a second set of vias of the plurality of vias, configured to connect the second portions of the plurality of conductive layers,
wherein the first spiral coil and the second spiral coil are arranged in a nested configuration.
2. The apparatus of claim 1 , wherein the first spiral coil is electrically coupled to the second spiral coil.
3. The apparatus of claim 2 , wherein the first spiral coil and the second spiral coil are coupled in series.
4. The apparatus of claim 2 , wherein the first spiral coil and the second spiral coil are coupled in parallel.
5. The apparatus of claim 1 , wherein the first spiral coil is magnetically coupled to the second spiral coil.
6. The apparatus of claim 5 , wherein the first spiral coil and the second spiral coil are arranged in a transformer configuration and include at least one input tap and one output tap.
7. The apparatus of claim 1 , further comprising:
a third spiral coil arranged in a second plane perpendicular to the substrate, wherein the third spiral coil is formed of third portions of the plurality of conductive layers and a third set of vias of the plurality of vias, configured to connect the third portions of the plurality of conductive layers.
8. The apparatus of claim 7 , wherein the third spiral coil and the second spiral coil are magnetically coupled to each other and wherein the first spiral coil and the third spiral coil are electrically coupled to each other.
9. The apparatus of claim 7 , wherein the first spiral coil, the second spiral coil, and the third spiral coil are electrically coupled.
10. The apparatus of claim 9 , wherein the first spiral coil, the second spiral coil, and the third spiral coil are coupled in series.
11. The apparatus of claim 9 , wherein the first spiral coil, the second spiral coil, and the third spiral coil are coupled in parallel.
12. The apparatus of claim 1 , wherein the first spiral coil is magnetically coupled to the second spiral coil in a transformer configuration.
13. The apparatus of claim 1 , wherein the substrate comprises at least one of an active component, a passive component, or metal routings located under the first spiral coil.
14. The apparatus of claim 1 , wherein the first spiral coil is formed in a back end of line (BEOL) stack.
15. The apparatus of claim 1 , wherein the apparatus is selected from the group consisting of a music player, a video player, an entertainment unit, a navigation device, a communications device, a mobile device, a mobile phone, a smartphone, a personal digital assistant, a fixed location terminal, a tablet computer, a computer, a wearable device, a laptop computer, a server, and a device in an automotive vehicle.