Laser device
Provided is a laser device according to embodiments of the inventive concept comprising a substrate including a gain region, a phase control region, and a tuning region arranged along a first direction, the substrate having an air gap which extends from the phase control region to the tuning region, an upper clad layer on the substrate, a waveguide structure extending in the first direction between the upper clad layer and the substrate, a first upper electrode disposed on the upper surface of the upper clad layer of the tuning region, and a lower electrode disposed on a lower surface of the substrate and extending from the gain region to the tuning region, wherein the air gap may have a larger width than the waveguide in a second direction crossing the first direction.
1. A laser device comprising:
a substrate comprising a gain region, a phase control region, and a tuning region arranged along a first direction, the substrate having an air gap which extends from the phase control region to the tuning region;
an upper clad layer on the substrate;
a waveguide structure extending in the first direction between the upper clad layer and the substrate;
a first upper electrode disposed on the upper surface of the upper clad layer of the gain region; and
a lower electrode disposed on the lower surface of the substrate and extending from the gain region to the tuning region,
wherein the air gap has a larger width than the waveguide in a second direction crossing the first direction,
the substrate comprises a support layer and a lower clad layer disposed on the support laver,
the lower clad layer has a width, in the second direction, which is smaller than that of the support laver, and
the air gap is located at a lower level than the lower clad layer.
2. The laser device of claim 1 , further comprising grating patterns in the substrate of the tuning region, the grating patterns disposed between the air gap and the upper surface of the substrate.
3. The laser device of claim 1 , wherein the width of the air gap in the second direction is greater than that of the lower clad layer in the second direction.
4. The laser device of claim 1 , wherein the air gap has a width smaller than the maximum width of the substrate in the second direction.
5. The laser device of claim 1 , further comprising:
a second upper electrode on the upper clad layer of the phase control region;
a third upper electrode on the upper clad layer of the tuning region; and
an upper insulating layer between the second and third upper electrodes and the upper cladding layer.
6. The laser device of claim 1 , further comprising:
a second upper electrode on the upper clad layer of the phase control region; and
a plurality of pads connected to the second upper electrode.
7. The laser device of claim 1 , wherein the waveguide structure further comprises: an active waveguide on the gain region; and a passive waveguide connected to the active waveguide and on the phase control region and the tuning region.
8. The laser device of claim 1 , further comprising side semiconductor patterns disposed on a side surface of the waveguide structure.
9. The laser device of claim 1 , wherein the upper clad layer has a conductivity type which is different from that of the substrate.
10. A laser device comprising:
a substrate comprising a gain region, a tuning region, and a phase control region between the gain region and the tuning region, the substrate having an air gap which extends from the phase control region to the tuning region;
a lower electrode disposed on a lower surface of the substrate and extending from the gain region to the tuning region;
an upper clad layer on the upper surface of the substrate;
a waveguide structure between the substrate and the upper cladding layer;
a first upper electrode disposed on the upper cladding layer of the gain region and electrically connected to the upper cladding layer;
a second upper electrode disposed on the upper clad layer of the phase control region and electrically insulated from the upper clad layer; and
a third upper electrode disposed on the upper clad layer of the tuning region and electrically insulated from the upper clad layer,
wherein the substrate comprises: a support laver; and a lower clad layer having a width which is smaller than that of the support layer, wherein the air gap is located at a lower level than the lower clad layer.
11. The laser device of claim 10 , wherein the lower electrode is electrically connected to the gain region, the phase control region, and the tuning region of the substrate.
12. The laser device of claim 10 , wherein the upper clad layer has a conductivity type which is different from that of the substrate.
13. The laser device of claim 10 , further comprising:
a first pad on the first upper electrode; and
an insulating pillar between the first pad and the substrate,
wherein the insulating pillar has a lower permittivity than the substrate.
14. The laser device of claim 10 , further comprising:
second pads on the second upper electrode; and
third pads on the third upper electrode.