Optical module
View Patent ↗An optical module includes: a Peltier module; an optical semiconductor element mounted on the Peltier module; and a driver that drives high-frequency lines of the optical semiconductor element. The optical semiconductor element includes: optical circuits providing a function of an optical interferometer and the high-frequency lines. Cooling performance of the Peltier module in a region in vicinity of the driver is higher than the cooling performance in other regions.
1. An optical module comprising:
a cooling element;
an optical semiconductor element mounted on the cooling element; and
a driver configured to drive a high-frequency circuit of the optical semiconductor element,
wherein the optical semiconductor element comprises:
an optical circuit configured to provide an optical interferometer; and
the high-frequency circuit on a surface of the optical circuit;
wherein the optical circuit includes two optical waveguides;
wherein a cooling performance of the cooling element is higher in a first region than in other regions, the first region being immediately below a region through which one of the two optical waveguides passes; and
wherein the first region is a region in a vicinity of the driver.
2. The optical module according to claim 1 ,
wherein the cooling element is a Peltier module including pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors arranged two-dimensionally along an in-plane direction of a joint face with respect to the optical semiconductor element; and
wherein within a region in the in-plane direction, a density of the pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors in the region of the driver is higher than a density of the pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors in the other regions.
3. The optical module according to claim 1 ,
wherein the optical circuit and the high-frequency circuit constitute a Mach-Zehnder optical modulator.
4. An optical module comprising:
a cooling element;
an optical semiconductor element mounted on the cooling element; and
a terminator configured to terminate a high-frequency circuit of the optical semiconductor element,
wherein the optical semiconductor element includes:
an optical circuit configured to provide an optical interferometer; and
the high-frequency circuit on a surface of the optical circuit;
wherein the optical circuit includes two optical waveguides;
wherein a cooling performance of the cooling element is higher in a second region than in other regions, the second region being immediately below a region through which one of the two optical waveguides passes; and
wherein the second region is a region in a vicinity of the terminator.
5. The optical module according to claim 4 ,
wherein the cooling element is a Peltier module including pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors arranged two-dimensionally along an in-plane direction of a joint face with respect to the optical semiconductor element; and
wherein within a region in the in-plane direction, a density of the pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors in the region of the terminator is higher than a density of the pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors in the other regions.
6. The optical module according to claim 4 , wherein the terminator is monolithically integrated with a surface of the optical semiconductor element.
7. The optical module according to claim 4 , wherein the terminator is flip-chip mounted on a surface of the optical semiconductor element.
8. The optical module according to claim 4 ,
wherein the optical circuit and the high-frequency circuit constitute a Mach-Zehnder optical modulator.
9. An optical module comprising:
a cooling element;
an optical semiconductor element mounted on the cooling element;
a driver configured to drive a high-frequency circuit of the optical semiconductor element; and
a terminator configured to terminate the high-frequency circuit,
in which: the optical semiconductor element includes
an optical circuit providing a function of an optical interferometer and
the high-frequency circuit formed on a surface of the optical circuit;
wherein the optical circuit includes two optical waveguides;
wherein a cooling performance of the cooling element is higher in a third region than in other regions, the third region being immediately below a region through which one of the two optical waveguides passes; and
wherein the third region includes a first region in a vicinity of the driver and a second region in a vicinity of the terminator.
10. The optical module according to claim 9 ,
wherein the cooling element is a Peltier module including pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors arranged two-dimensionally along an in-plane direction of a joint face with respect to the optical semiconductor element; and
wherein within a region in the in-plane direction, densities of the pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors in the region in a vicinity of the driver and the region of the terminator are higher than a density of the pairs of p-type thermoelectric semiconductors and n-type thermoelectric semiconductors in the other regions.
11. The optical module according to claim 9 ,
wherein the terminator is monolithically integrated with a surface of the optical semiconductor element.
12. The optical module according to claim 9 ,
wherein the terminator is flip-chip mounted on a surface of the optical semiconductor element.
13. The optical module according to claim 9 ,
wherein the optical circuit and the high-frequency circuit constitute a Mach-Zehnder optical modulator.