High dynamic range single photon avalanche detector array on silicon with circuitry for light detection and ranging

1. An image sensor array comprising:

a substrate; and

a plurality of pixels, each pixel comprising:

a single photon avalanche detector (SPAD), the SPAD having (1) a trench coupled to the substrate and having a lattice mismatch with the substrate and (2) a substantially defect-free region coupled to the trench and configured to generate an avalanche current when a photon is detected in the region, wherein the trench and the defect-free region form an electrode;

a quench device coupled to a respective SPAD and configured to quench the avalanche current; and

time measurement circuitry configured to measure a time-of-flight of the photon.

2. The image sensor array of claim 1 , wherein the lattice mismatch causes a dislocation defect which ends at a sidewall of the trench.

3. The image sensor array of claim 1 , wherein the trench has an aspect ratio of at least 1.7 times higher than its width.

4. The image sensor array of claim 1 , wherein the substrate comprises silicon.

5. The image sensor array of claim 1 , wherein the trench comprises germanium or a germanium alloy.

6. The image sensor array of claim 1 , wherein at least one pixel comprises a plurality of single photon avalanche detectors and a plurality of quench devices, each quench device coupled to a respective SPAD, the plurality of single photon avalanche detectors coupled to one another in parallel.

7. The image sensor array of claim 1 , wherein the time measurement circuitry is a time-to-analog converter or a time-to-digital converter.

8. The image sensor array of claim 1 , wherein the quench device is a transistor or resistor.

9. The image sensor array of claim 1 , wherein the SPAD is on a first wafer and the quench device and the time measurement circuitry are on a second wafer, wherein the first wafer is bonded to the second wafer.

10. The image sensor array of claim 9 , wherein the first wafer is bonded to the second wafer using a copper-to-copper bonding.

11. The image sensor array of claim 1 , wherein each pixel further comprises a pulse generator configured to provide a signal to the time measurement circuitry.

12. The image sensor array of claim 11 , wherein the pulse generator is an inverter or comparator.

13. The image sensor array of claim 1 , wherein the time measurement circuitry further comprises a ring oscillator configured to activate or deactivate upon a pulse received from the SPAD.

14. The image sensor array of claim 13 , wherein the ring oscillator can be operated in reverse mode or forward mode, wherein the time measurement circuitry is configured to switch the ring oscillator between the reverse mode and the forward mode.

15. The image sensor array of claim 1 , wherein the plurality of pixels are arranged in an m by n array, the image sensor array further comprising a column multiplexer configured to receive data from the time measurement circuitry and to output range data.

16. The image sensor array of claim 15 , the image sensor array further comprising:

a row decoder configured to select a row of the plurality of pixels and to read a charge on the respective time measurement circuitry; and

column capacitor and/or amplifier circuitry configured to read the charge on the respective time measurement circuitry.

17. An imaging system comprising:

an infrared laser configured to provide a pulse of light; and

the image sensor array of claim 1 configured to receive the pulse from the infrared laser.

18. The imaging system of claim 17 , wherein at least one pixel comprises a plurality of single photon avalanche detectors coupled in parallel to one another.

19. The imaging system of claim 17 , wherein the image sensor array detects range data from a field of view in a single pulse from the infrared laser.

20. The imaging system of claim 17 , wherein the infrared laser has a period of greater than 2.67 microseconds.