Film stack simplification for high aspect ratio patterning and vertical scaling
Methods for forming patterned multi-layer stacks including a metal-containing layer are provided herein. Methods involve using silicon-containing non-metal materials in a multi-layer stack including one sacrificial layer to be later removed and replaced with metal while maintaining etch contrast to pattern the multi-layer stack and selectively remove the sacrificial layer prior to depositing metal. Methods involve using silicon oxycarbide in lieu of silicon nitride, and a sacrificial non-metal material in lieu of a metal-containing layer, to fabricate the multi-layer stack, pattern the multi-layer stack, selectively remove the sacrificial non-metal material to leave spaces in the stack, and deposit metal-containing material into the spaces. Sacrificial non-metal materials include silicon nitride and doped polysilicon, such as boron-doped silicon.
1. A method comprising:
providing a semiconductor substrate;
depositing a metal-free multi-layer stack having at least three different materials, at least one of the three different materials being a sacrificial layer;
etching a trench or via in the metal-free multi-layer stack having the at least three different materials;
recessing one of the at least three different materials after etching the trench or via to form a recessed region of the via;
depositing a dielectric or semiconductor material into the trench or via;
etching back the dielectric or semiconductor material in the trench or via to form smooth sidewalls, leaving the dielectric or semiconductor material in the recessed region; and
prior to selectively etching the sacrificial layer, depositing a gate material into the trench or via, and recessing a dielectric material in sidewalls of the trench or via in the metal-free multi-layer stack;
selectively etching the sacrificial layer relative to other materials of the metal-free multi-layer stack to form at least one space between layers of the metal-free multi-layer stack; and
depositing metal in the at least one space to form a metal-containing multi-layer stack having a trench or via etched therein.
2. The method of claim 1 , wherein the metal-free multi-layer stack includes three different materials.
3. The method of claim 1 , wherein the metal-free multi-layer stack includes four different materials.
4. The method of claim 1 , wherein the sacrificial layer is selected from the group consisting of polysilicon and silicon nitride.
5. The method of claim 1 , wherein the at least three different materials comprise materials selected from the group consisting of silicon oxide, undoped polysilicon, doped polysilicon, silicon nitride, oxygen-doped silicon carbide, and nitrogen-doped silicon carbide.
6. The method of claim 1 , wherein layers of the metal-free multi-layer stack are deposited by a technique selected from the group consisting of atomic layer deposition, chemical vapor deposition, plasma-enhanced chemical vapor deposition, and physical vapor deposition.
7. The method of claim 1 , wherein layers of the metal-free multi-layer stack are deposited in different chambers of a single tool.
8. The method of claim 1 , wherein layers of the metal-free multi-layer stack are deposited without breaking vacuum.