Method for manufacturing semiconductor device
A semiconductor device with less variations in transistor characteristics is provided. A first insulator, first and second oxide films, a first conductive film, a first insulating film, and a second conductive film are deposited and processed to form a first and second oxides, a first conductive layer, a first insulating layer, and a second conductive layer. In the process, a layer is formed to cover the first and second oxides, the first conductive layer, the first insulating layer, and the second conductive layer. The second conductive layer and the layer are removed. A second insulating layer in contact with side surfaces of the first and second oxides, the first conductive layer, and the first insulating layer is formed, and a second insulator is formed thereover. An opening reaching the second oxide is formed in the first conductive layer, the first insulating layer, the second insulating layer, and the second insulator.
1. A method for manufacturing a semiconductor device, comprising:
depositing a first insulator, a first oxide film, a second oxide film, a first conductive film, a first insulating film, and a second conductive film in this order over a substrate;
processing the first oxide film, the second oxide film, the first conductive film, the first insulating film, and the second conductive film into an island shape to form a first oxide, a second oxide, a first conductive layer, a first insulating layer, and a second conductive layer;
forming a layer to cover the first oxide, the second oxide, the first conductive layer, the first insulating layer, and the second conductive layer in the processing;
removing the second conductive layer and the layer;
depositing a second insulating film over the first insulator, the first oxide, the second oxide, the first conductive layer, and the first insulating layer;
performing anisotropic etching on the second insulating film to form a second insulating layer in contact with side surfaces of the first oxide, the second oxide, the first conductive layer, and the first insulating layer;
forming a second insulator over the first insulator, the first oxide, the second oxide, the first conductive layer, the first insulating layer, and the second insulating layer;
forming an opening reaching the second oxide, in the first conductive layer, the first insulating layer, the second insulating layer, and the second insulator;
forming a first conductor and a second conductor from the first conductive layer, forming a third insulator and a fourth insulator from the first insulating layer, and forming a fifth insulator and a sixth insulator from the second insulating layer in the formation of the opening; and
forming a third oxide, a seventh insulator over the third oxide, and a third conductor over the seventh insulator, in the opening.
2. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the removal of the second conductive layer and the layer is performed by a dry etching method.
3. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein an eighth insulator is deposited over the second insulator, the third oxide, the seventh insulator, and the third conductor by a sputtering method in an atmosphere containing oxygen.
4. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the layer comprises a main component of the second conductive layer.
5. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the third insulator to the sixth insulator can further inhibit diffusion of oxygen than the second insulator.
6. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the first oxide can further inhibit diffusion of oxygen than the second oxide.
7. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein heat treatment is performed at a temperature higher than or equal to 400° C. and lower than or equal to 600° C. after the deposition of the second oxide film.