Thermoelectric element
Provided according to an embodiment is a thermoelectric element comprising: a first insulating part; multiple first electrodes disposed on the first insulating part; a second electrode disposed above the first electrodes; a first conductive semiconductor structure and a second conductive semiconductor structure disposed while being spaced each other between the first electrodes and the second electrode; and a second insulating part disposed on the second electrode, wherein the first insulating part comprises first protrusions protruding toward the first electrodes, and the second insulating part comprises a second protrusion protruding toward the second electrode.
1. A thermoelectric element comprising:
a first insulating part;
a plurality of first electrodes disposed on the first insulating part;
a plurality of second electrodes disposed above the first electrodes;
a first conductive semiconductor structure and a second conductive semiconductor structure which are disposed apart from each other between the first electrodes and the second electrodes; and
a second insulating part disposed on the second electrodes,
wherein the first insulating part includes a first protruding part protruding toward the first electrodes,
wherein the second insulating part includes a second protruding part protruding toward the second electrodes,
wherein each of the first electrode and the second electrode includes a groove portion disposed at an edge of a surface facing a substrate adjacent thereto and a protruding electrode disposed at an edge of a lower surface of the groove portion,
wherein the groove portion has a closed-loop when viewed from above, and
wherein a height of the protruding electrode in a vertical direction is less than or equal to a height of the groove portion in the vertical direction.
2. The thermoelectric element of claim 1 , wherein the first protruding part and the second protruding part overlap in a vertical direction.
3. The thermoelectric element of claim 2 , wherein the first protruding part and the second protruding part have the same shape based on the first conductive semiconductor structure and the second conductive semiconductor structure.
4. The thermoelectric element of claim 2 , wherein the first protruding part and the second protruding part have different shapes based on the first conductive semiconductor structure and the second conductive semiconductor structure.
5. The thermoelectric element of claim 1 , wherein the first protruding part and the second protruding part are disposed apart from each other in a vertical direction.
6. The thermoelectric element of claim 1 , wherein a height of the first protruding part is less than or equal to 0.5 times a thickness of the first electrode.
7. The thermoelectric element of claim 1 , wherein a height of the first protruding part is greater than or equal to 0.5 times a thickness of the first electrode.
8. The thermoelectric element of claim 1 , wherein each of the first protruding part and the second protruding part is disposed in the groove portion.