Substrate processing device and substrate processing method
The present disclosure relates to a substrate processing device and a substrate processing method, the substrate processing device comprising: a chamber; a substrate support part installed in a processing space inside the chamber so as to enable one or more substrate to rotate; a first gas spraying part for spraying a source gas on a first area of the processing space; a second gas spraying part for spraying, on a second area of the processing space, a reactant gas reacting with the source gas on the second area; and a third gas spraying part for spraying, on a third area, a purge gas for dividing the first area and the second area.
1. A method of processing a substrate, the method comprising: a step of, when a first substrate is disposed in a first region of a process space of a chamber, distributing a source gas to the first region to perform an adsorption process in a state where the substrate is stopped; a step of, when the adsorption process ends, rotating a substrate supporting unit supporting the first substrate in order for the first substrate to be disposed in a second region of the process space of the chamber distributes a plasma gas in the first zone and a second zone of the third region and distributes a purge gas to the first zone, the second zone, and a third zone of the third region, wherein the second zone is located between the second region and the first region, wherein the third zone is located between the first zone and the second zone; a step of, when the first substrate is disposed in the second region, distributing a reactant gas to the second region to perform a deposition process in a state where the substrate is stopped; and a step of, when the deposition process ends, rotating the substrate supporting unit in order for the first substrate to be disposed in the first region, wherein the step of performing the deposition process distributes a reactant gas, activated by using plasma, to the second region to perform the deposition process.
2. The method of claim 1 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the second region rotates the substrate supporting unit in order for the first substrate to pass through a first zone of a third region disposed between the first region and the second region and generates plasma in the first zone while the first substrate is passing through the first zone.
3. The method of claim 1 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the first region rotates the substrate supporting unit in order for the first substrate to pass through a second zone of a third region disposed between the second region and the first region and generates plasma in the second zone while the first substrate is passing through the second zone.
4. The method of claim 1 , wherein each of the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the second region and the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the first region generates plasma in a first zone and a second zone of a third region disposed between the first region and the second region.
5. The method of claim 1 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the second region rotates the substrate supporting unit in order for the first substrate to pass through a first zone of a third region disposed between the first region and the second region.
6. The method of claim 5 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the second region distributes a plasma gas to the first zone and distributes a purge gas to the first zone.
7. The method of claim 6 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the first region rotates the substrate supporting unit in order for the first substrate to pass through a second zone of the third region disposed between the second region.
8. The method of claim 7 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the first region distributes a plasma gas to the second zone and distributes a purge gas to the second zone.
9. The method of claim 8 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the first region distributes a purge gas to a third zone of the third region, wherein the third zone is located between the first zone and the second zone.
10. The method of claim 5 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the second region continuously rotates the substrate supporting unit without stopping.
11. The method of claim 7 , wherein the step of rotating the substrate supporting unit in order for the first substrate to be disposed in the first region continuously rotates the substrate supporting unit without stopping.