Semiconductor inspection device and method of inspecting a semiconductor wafer
A semiconductor inspection device, including a stage having first and second surfaces opposite to each other, a first holding part for holding the semiconductor wafer apart from the first surface and protruding from the first surface of the stage, a plurality of air suction holes and air supply holes, through which a gas is suctioned from or supplied to a space between the semiconductor wafer and the stage, and an imaging unit configured to capture an image of a second main surface of the semiconductor wafer, after the gas is concurrently suctioned from, and supplied to, the space between the semiconductor wafer and the stage, to thereby correct a warpage of the semiconductor wafer. Each of the air suction holes and the air supply holes has a first opening provided at a predetermined position in the first surface of the stage, and a second opening for connecting to a suction unit or an air supply unit.
1. A semiconductor inspection device configured to capture an image of a semiconductor wafer, after gas is concurrently suctioned from and supplied to a space between the semiconductor wafer and a stage, for correcting a warpage of the semiconductor wafer, the semiconductor inspection device comprising:
the stage, having
a first surface, for placing thereon a semiconductor wafer that has a first main surface and a second main surface opposite to each other, and
a second surface opposite to the first surface;
a first holding part provided on the stage and protruding from the first surface of the stage, the first holding part being configured to be in contact with the first main surface of the semiconductor wafer to thereby hold the semiconductor wafer, such that the first main surface of the semiconductor wafer is apart from the first surface of the stage, the space being formed between the first main surface of the semiconductor wafer and the first surface of the stage;
a plurality of air suction holes, through which the gas in the space between the semiconductor wafer and the stage is suctioned, each of the air suction holes having
a first opening provided at a predetermined first position in the first surface of the stage, and
a second opening for connecting to a vacuum pump;
a plurality of air supply holes for supplying the gas to the space between the semiconductor wafer and the stage, each of the air supply holes having
a first opening provided at a predetermined second position in the first surface of the stage, and
a second opening for connecting to an air pump; and
an inspection head configured to capture an image of the second main surface of the semiconductor wafer.
2. The semiconductor inspection device according to claim 1 , wherein
the first holding part is configured to be in contact with an outer peripheral portion of the first main surface of the semiconductor wafer.
3. The semiconductor inspection device according to claim 1 , wherein
the first holding part is configured to be supported by the first surface of the stage in a moveable manner, so as to move the semiconductor wafer in a first direction away from the first surface of the stage and in a second direction toward the first surface of the stage.
4. The semiconductor inspection device according to claim 1 , further comprising
a second holding part provided facing the first holding part, and configured to be in contact with a portion of the second main surface of the semiconductor wafer, to thereby hold the semiconductor wafer between the first and second holding parts.
5. The semiconductor inspection device according to claim 1 , wherein
the first surface of the stage has a plurality of predetermined sections;
the vacuum pump includes a plurality of section-dedicated vacuum pumps, respectively corresponding to the plurality of predetermined sections; and
each of the predetermined sections has a number of the air suction holes formed therein, which are collectively connected to one of the section-dedicated vacuum pumps corresponding to said each predetermined section, different amounts of the gas being suctioned from the space between the semiconductor wafer and the stage from different ones of the predetermined sections.
6. The semiconductor inspection device according to claim 1 , wherein
the first surface of the stage has a plurality of predetermined sections;
the air pump includes a plurality of section-dedicated air pumps respectively corresponding to the plurality of predetermined sections;
each of the predetermined sections has a number of the air supply holes formed therein, which are collectively connected to one of the section-dedicated air pumps corresponding to said each predetermined section, different amounts of the gas being supplied to the space between the semiconductor wafer and the stage from different ones of the predetermined sections.
7. The semiconductor inspection device according to claim 1 , wherein
the predetermined first positions of the air suction holes and the predetermined second positions of the air supply holes are predetermined based on a state of the warpage of the semiconductor wafer.
8. A method of inspecting the semiconductor wafer using the semiconductor inspection device according to claim 1 , the method comprising:
a holding process including holding the semiconductor wafer at a position apart from the first surface of the stage by the first holding part, the first main surface of the semiconductor wafer facing the stage, a portion of the first main surface being in contact with the first holding part;
a suction process including suctioning the gas from the space between the semiconductor wafer and the stage, through the plurality of air suction holes;
a supply process including supplying the gas to the space between the semiconductor wafer and the stage, through the plurality of air supply holes; and
an imaging process including capturing an image of the second main surface of the semiconductor wafer by the inspection head, wherein
the imaging process is performed after concurrently performing the suction process and the supply process to correct a warpage of the semiconductor wafer.
9. The method according to claim 8 , further comprising
an obtaining process including, before the holding process, obtaining the predetermined first positions for the air suction holes and the predetermined second positions for the air supply holes in the first surface of the stage, based on a state of the warpage of the semiconductor wafer, such that the air suction holes and the air supply holes are disposed at the predetermined first and second positions accordingly.