Light receiving element and distance measuring device
To prevent leakage of incident light from pixels around a pixel region ( 11 ) of a light receiving element. A light receiving element includes a pixel region and an adjacent pixel ( 400 ). In the pixel region, a plurality of pixels ( 100 ) is arranged, the plurality of pixels including a photodiode formed in a semiconductor substrate ( 110 ) in which a charge generated by photoelectric conversion of incident light is multiplied with a high reverse bias voltage, an on-chip lens ( 160 ) that focuses the incident light on the photodiode, and a wiring region ( 120 ) having a wiring layer ( 122 ) connected to the photodiode and an insulating layer ( 121 ) that insulates the wiring layer. The adjacent pixel is arranged adjacent to the pixel region and includes the photodiode, an on-chip lens ( 161 ) having a curvature different from a curvature of the on-chip lens, and the wiring region.
1. A light receiving element, comprising:
a pixel region in which a plurality of pixels is arranged, the plurality of pixels including a photodiode formed on a semiconductor substrate in which a charge generated by photoelectric conversion of incident light is multiplied with a high reverse bias voltage, an on-chip lens that focuses the incident light on the photodiode, and a wiring region having a wiring layer connected to the photodiode and an insulating layer that insulates the wiring layer; and
an adjacent pixel arranged adjacent to the pixel region and including a photodiode, and a semiconductor region light-blocking wall formed on the semiconductor substrate at a boundary between the pixel region and the adjacent pixel and blocking the incident light.
2. The light receiving element according to claim 1 , wherein in the adjacent pixel, the semiconductor region light-blocking wall is not formed on a boundary different from a boundary with the pixel region.
3. The light receiving element according to claim 1 , wherein the semiconductor region light-blocking wall is formed by arranging a material that blocks the incident light in a groove formed in the semiconductor substrate.
4. A light receiving element, comprising:
a pixel region in which a plurality of pixels is arranged, the plurality of pixels including a photodiode formed on a semiconductor substrate in which a charge generated by photoelectric conversion of incident light is multiplied with a high reverse bias voltage, an on-chip lens that focuses the incident light on the photodiode, and a wiring region having a wiring layer connected to the photodiode and an insulating layer that insulates the wiring layer; and
an adjacent pixel arranged adjacent to the pixel region and including a photodiode, and a wiring region light-blocking wall arranged in the wiring region at a boundary between the pixel region and the pixels-adjacent pixel and blocking the incident light.
5. The light receiving element according to claim 4 , wherein the wiring region light-blocking wall includes the wiring layer arranged at a boundary with an adjacent pixel of the pixels, and a wall-shaped wall portion arranged adjacently between the wiring layer and the semiconductor substrate.
6. The light receiving element according to claim 4 , wherein the wiring region light-blocking wall includes a plurality of the wiring layers arranged in multiple layers at a boundary with an adjacent pixel of the pixels, and a wall-shaped interlayer wall portion arranged between layers of the plurality of the wiring layers.