IP Library Granted Patent US 12,119,173
Granted Patent B2
US 12,119,173 · App. 17/607,599 · Granted Oct 15, 2024

Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier

Inventors: Henning Aust (Mühltal, DE); Timo Adler (Gernsheim, DE); Clemens Pihan (Darmstadt, DE)
Assignee: Applied Materials, Inc.
H01F7/0236C23C14/50C23C14/568C23C16/4587C23C16/54H01L21/67709H01L21/6776
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Quick Facts
Patent No.
US 12,119,173
App. No.
17/607,599
Granted
Oct 15, 2024
Kind
B2
Abstract

A magnetic levitation system for transporting a carrier is described. The magnetic levitation system includes a base defining a transportation track, a carrier movable relative to the base along the transportation track, and a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier. The guided structure includes a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings and a recessed zone. The recessed zone is arranged between the first guided zone and the second guided zone in a transport direction of the carrier and is recessed with respect to the first guided zone and the second guided zone.

Claims (40)

1. A magnetic levitation system for transporting a carrier, comprising:

a base defining a transportation track;

a carrier movable along the transportation track; and

a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier, the guided structure comprising:

a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings; and

a recessed zone arranged between the first guided zone and the second guided zone in a transport direction of the carrier, the recessed zone being recessed with respect to the first guided zone and the second guided zone,

wherein one or more controllers are configured to actively control at least one magnetic bearing of the plurality of active magnetic bearings when the at least one magnetic bearing faces one of the first guided zone and the second guided zone, and wherein the one or more controllers are configured to switch off the active control of the at least one magnetic bearing when the at least one magnetic bearing faces the recessed zone.

2. The magnetic levitation system of claim 1 ,

wherein the first guided zone and the second guided zone define a first plane, the first plane having a first distance from the plurality of active magnetic bearings during the carrier transport, and

wherein the recessed zone defines a second plane, the second plane having a second distance from the plurality of magnetic bearings greater than the first distance during the carrier transport.

3. The magnetic levitation system of claim 2 , wherein the first distance is 2 mm or less, and/wherein the second distance is 3 mm or more.

4. The magnetic levitation system of claim 2 , wherein the first distance is about 1.5 mm and the second distance is about 5 mm.

5. The magnetic levitation system of claim 1 , wherein the carrier has an upper carrier surface, a front part of the upper carrier surface in the transport direction constituting the first guided zone and a rear part of the upper carrier surface in the transport direction constituting the second guided zone.

6. The magnetic levitation system of claim 1 , wherein the first guided zone and the second guided zone have a dimension of 30 cm or more in the transport direction.

7. The magnetic levitation system of claim 1 , wherein the one or more controllers are for individually controlling the plurality of active magnetic bearings depending on a carrier position along the transportation track.

8. The magnetic levitation system of claim 1 , further comprising a linear motor for moving the carrier along the transportation track, wherein the linear motor is configured to determine a carrier position along the transportation track and to forward the carrier position to one or more controllers of the plurality of active magnetic bearings.

9. The magnetic levitation system of claim 1 , wherein a plurality of permanent magnets configured to contribute to a carrier levitation force are provided at the recessed zone.

10. The magnetic levitation system of claim 9 , wherein the plurality of permanent magnets are arranged in two parallel traces at a distance corresponding to a distance between magnetic material components of the plurality of active magnetic bearings.

11. A carrier of a magnetic levitation system, the carrier being movable along a transportation track defined by a base, the carrier comprising:

a guided structure including a first guided zone and a second guided zone configured to magnetically interact with a plurality of active magnetic bearings; and

a recessed zone arranged between the first guided zone and the second guided zone in a transport direction of the carrier and recessed with respect to the first guided zone and the second guided zone, wherein the recessed zone has a dimension of 1 m or more in the transport direction.

12. A base of a magnetic levitation system, the base defining a transportation track for a carrier and comprising:

a plurality of active magnetic bearings for generating a levitation force for holding the carrier; and

one or more controllers for individually controlling the plurality of active magnetic bearings depending on a carrier position along the transportation track, wherein the one or more controllers are configured to actively control a first subset of the plurality of active magnetic bearings facing one of a first guided zone and a second guided zone of the carrier and to not actively control a second subset of the plurality of active magnetic bearings facing a recessed zone of the carrier arranged between the first guided zone and the second guided zone.

13. A method of levitating a carrier, the carrier comprising a first guided zone, a second guided zone, and a recessed zone between the first guided zone and the second guided zone in a transport direction of the carrier, the method comprising:

controlling a plurality of active magnetic bearings for levitating the carrier with respect to a base, wherein a first subset of the plurality of active magnetic bearings facing one of the first guided zone and the second guided zone is actively controlled, or switched on, and a second subset of the plurality of active magnetic bearings facing the recessed zone is not actively controlled, or switched off.

14. The method of claim 13 , further comprising:

transporting the carrier along a transportation track defined by the base; and

repeatedly determining a carrier position along the transportation track and allocating magnetic bearings of the plurality of active magnetic bearings to the first subset to the second subset depending on the carrier position.

15. The method of claim 13 , wherein a first part of a levitation force levitating the carrier acts between the first subset of the plurality of active magnetic bearings and the first and second guided zones, and a second part of the levitation force acts between the second subset of the plurality of active magnetic bearings and a plurality of permanent magnets provided at the recessed zone.

16. The method of claim 15 , wherein the first part of the levitation force is actively controlled to maintain a constant distance between the first subset and the first and second guided zones.

17. The method of claim 15 , wherein the second part of the levitation force is generated by passive units.

18. The method of claim 15 , wherein the carrier has an essentially vertical orientation during transport.

19. A magnetic levitation system for transporting a carrier, comprising:

a base defining a transportation track;

a carrier movable along the transportation track; and

a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier, the guided structure comprising:

a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings; and

a recessed zone arranged between the first guided zone and the second guided zone in a transport direction of the carrier, the recessed zone being recessed with respect to the first guided zone and the second guided zone,

wherein the recessed zone has a dimension of 1 m or more in the transport direction.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 1, 2022
From: MECATRONIX GMBH
To: APPLIED MATERIALS, INC.
Reel/Frame 060067/0026 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE ADDRESS PREVIOUSLY RECORDED AT REEL: 059751 FRAME: 0854. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT . Recorded May 5, 2022
From: AUST, HENNING; ADLER, TIMO; PIHAN, CLEMENS
To: MECATRONIX GMBH
Reel/Frame 059858/0068 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 27, 2022
From: AUST, HENNING; ADLER, TIMO; PIHAN, CLEMENS
To: MECATRONIX GMBH
Reel/Frame 059751/0854 →
Continuity (1)
Related Publication 20220208426A1 · Jun 30, 2022