Two-dimensional-material-based field-effect transistor for detection of pathogens and methods for manufacturing
In at least one illustrative embodiment, a field-effect transistor biosensor for detection of a pathogen includes a substrate and a channel formed from a two-dimensional monolayer or few-layer metal chalcogenide that is functionalized with a biorecognition element. The biorecognition element may be an antibody, such as an antibody for the SARS-CoV-2 spike protein. A method for manufacturing the biosensor includes depositing an amorphous two-dimensional material on the substrate with pulsed laser ablation, crystallizing the amorphous two-dimensional material to generate a two-dimensional monolayer coupled to the substrate, and activating a surface of the two-dimensional material with the biorecognition element after crystallizing the amorphous two-dimensional material. The composition of the two-dimensional material may be tuned. The substrate may be photolithographically patterned. Other embodiments are described and claimed.
1. A method for manufacturing a field-effect transistor biosensor to detect pathogens in a sample, the method comprising:
depositing an amorphous two-dimensional material on a substrate with pulsed laser ablation;
crystallizing the amorphous two-dimensional material to generate a two-dimensional monolayer or few-layer coupled to the substrate; and
activating a surface of the two-dimensional material with a biorecognition element for pathogen detection after crystallizing the amorphous two-dimensional material.
2. The method of claim 1 , wherein:
depositing the amorphous two-dimensional material comprises depositing the amorphous two-dimensional material at ambient temperature; and
crystallizing the amorphous two-dimensional material comprises crystallizing the amorphous two-dimensional material with a thermal oven.
3. The method of claim 2 , wherein depositing the amorphous two-dimensional material at ambient temperature comprises depositing the amorphous two-dimensional material at an operating temperature below 150° C.
4. The method of claim 1 , wherein the two-dimensional material comprises a compositionally tunable transition metal dichalcogenide.
5. The method of claim 4 , wherein the transition metal dichalcogenide has a composition of MX 1.5-2 .
6. The method of claim 1 , wherein the two-dimensional material comprises a tunable metal monochalcogenide.
7. The method of claim 6 , wherein the metal monochalcogenide has a composition of MX 0.75-1 .
8. The method of claim 1 , wherein depositing the amorphous two-dimensional material on the substrate with pulsed laser ablation comprises controlling a number of laser pulses to determine a thickness of the amorphous two-dimensional material.
9. The method of claim 1 , further comprising photolithographically patterning the substrate with a device feature to generate a patterned substrate.
10. The method of claim 9 , wherein depositing the amorphous two-dimensional material comprises depositing the amorphous two-dimensional material after patterning the substrate on the patterned substrate.
11. The method of claim 9 , wherein patterning the substrate comprises patterning the substrate after crystallizing the amorphous two-dimensional material.
12. The method of claim 1 , further comprising depositing a source electrode and a drain electrode on the two-dimensional monolayer or few-layer.
13. The method of claim 1 , further comprising applying a source electrode and a drain electrode to the substrate, wherein depositing the amorphous two-dimensional material comprises depositing the amorphous two-dimensional material on the source electrode or the drain electrode.
14. The method of claim 1 , wherein activating the surface of the two-dimensional material with the biorecognition element comprises:
attaching a chemical linker to the surface of the two-dimensional material, wherein the chemical linker comprises 11-mercaptoundecanoic acid;
activating the chemical linker after attaching the chemical linker to the surface; and
attaching the biorecognition element after activating the chemical linker.