Thin film transistor, method for manufacturing the thin film transistor and display device comprising the thin film transistor
A thin film transistor can include a first gate electrode, an active layer including a channel portion, and a second gate electrode. The active layer is between the first gate electrode and the second gate electrode, and at least a portion of the first gate electrode does not overlap with the second gate electrode. Further, at least a portion of the second gate electrode does not overlap with the first gate electrode, and the channel portion overlaps with at least one of the first gate electrode and the second gate electrode. In addition, a first portion of the channel portion can overlaps with one of the first gate electrode and the second gate electrode, and a second portion of the channel portion can overlap with a remaining one of the first gate electrode and the second gate electrode that is not overlapped by the first portion of the channel portion.
1. A thin film transistor comprising:
a first gate electrode;
an active layer spaced apart from the first gate electrode, the active layer including a channel portion; and
a second gate electrode spaced apart from the active layer,
wherein the active layer is between the first gate electrode and the second gate electrode,
at least a portion of the first gate electrode does not overlap with the second gate electrode, and at least a portion of the second gate electrode does not overlap with the first gate electrode,
the channel portion overlaps with at least one of the first gate electrode and the second gate electrode,
a first portion of the channel portion overlaps with only one of the first gate electrode and the second gate electrode, and a second portion of the channel portion overlaps with only a remaining one of the first gate electrode and the second gate electrode that is not overlapped by the first portion of the channel portion,
the active layer further includes:
a first active layer including an oxide semiconductor material; and
a second active layer disposed on the first active layer, the second active layer including an oxide semiconductor material, and
the first active layer has a higher hydrogen concentration and a lower oxygen concentration than the second active layer, or the second active layer has a higher hydrogen concentration and a lower oxygen concentration than the first active layer.
2. The thin film transistor of claim 1 , wherein the channel portion includes:
a first channel area that overlaps with the first gate electrode and does not overlap with the second gate electrode; and
a second channel area that overlaps with the second gate electrode and does not overlap with the first gate electrode.
3. The thin film transistor of claim 2 , wherein the first channel area and the second channel area are positioned at opposite ends of the channel portion.
4. The thin film transistor of claim 2 , wherein the active layer includes a first connection portion and a second connection portion, the first and second connection portions being separated from each other and respectively connected to the channel portion.
5. The thin film transistor of claim 4 , wherein the first connection portion is in contact with the first channel area, and the second connection portion is in contact with the second channel area.
6. The thin film transistor of claim 5 , wherein the first connection portion does not overlap with the second gate electrode, and the second connection portion does not overlap with the first gate electrode.
7. The thin film transistor of claim 5 , wherein at least a portion of the first connection portion overlaps with the first gate electrode.
8. The thin film transistor of claim 1 , wherein a portion of the first gate electrode overlaps with a portion of the second gate electrode.
9. The thin film transistor of claim 1 , wherein a portion of the channel portion overlaps both of at least a portion of the first gate electrode and at least a portion of the second gate electrode.
10. The thin film transistor of claim 1 , further comprising a hydrogen supply layer disposed between the first gate electrode and the active layer, or on the active layer.
11. The thin film transistor of claim 1 , further comprising an oxygen supply layer disposed between the active layer and the second gate electrode.
12. The thin film transistor of claim 1 , wherein the first active layer and the second active layer have a same metal composition.
13. The thin film transistor of claim 1 , wherein the first active layer has a higher hydrogen concentration than the second active layer, and the second active layer has an oxygen concentration higher than the first active layer, or
wherein the first active layer has a higher oxygen concentration than the second active layer, and the second active layer has a higher hydrogen concentration than the first active layer.
14. The thin film transistor of claim 1 , wherein the first active layer has a first area overlapped with the first gate electrode, and the first area has a hydrogen concentration higher than a second area of the first active layer that does not overlap with the first gate electrode.
15. The thin film transistor of claim 1 , wherein the second active layer has a second area overlapped with the second gate electrode, and the second area has an oxygen concentration higher than a first area of the second active layer that does not overlap with the second gate electrode.
16. A display device comprising:
a display panel configured to display an image; and
the thin film transistor of claim 1 .