Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
There is provided a technique that includes: (a) supplying a molybdenum-containing gas containing molybdenum and oxygen to a substrate in a process chamber; (b) supplying an additive gas containing hydrogen to the substrate; and (c) supplying a reducing gas containing hydrogen and having a chemical composition different from that of the additive gas to the substrate, wherein at least two of (a), (b), and (c) are performed simultaneously or to partially overlap with each other in time one or more times or (a), (b), and (c) are performed sequentially one or more times to form a molybdenum film on the substrate.
1. A method of processing a substrate, comprising:
forming a molybdenum-containing film on the substrate by performing:
(a) supplying a molybdenum-containing gas to the substrate;
(b) supplying a first reducing gas to the substrate; and
(c) supplying a second reducing gas, which is different from the first reducing gas, to the substrate,
wherein (a), (b), and (c) are performed while a supply flow rate of the first reducing gas is larger than a supply flow rate of the molybdenum-containing gas and is smaller than a supply flow rate of the second reducing gas.
2. The method of claim 1 , wherein the molybdenum-containing gas contains a halogen element.
3. The method of claim 1 , wherein the molybdenum-containing gas contains a halogen element and an oxygen element.
4. The method of claim 1 , wherein the molybdenum-containing gas contains a halogen element and does not contain an oxygen element.
5. The method of claim 1 , wherein the first reducing gas is an additive gas.
6. The method of claim 1 , wherein the first reducing gas contains a 14 group element or a 15 group element.
7. The method of claim 1 , wherein the first reducing gas contains hydrogen.
8. The method of claim 6 , wherein the first reducing gas contains hydrogen.
9. The method of claim 1 , wherein the first reducing gas includes at least one selected from the group of SiH 4 , Si 2 H 6 , NH 3 , and C 5 H 5 .
10. The method of claim 1 , wherein the second reducing gas contains hydrogen.
11. The method of claim 7 , wherein the second reducing gas contains hydrogen.
12. The method of claim 8 , wherein the second reducing gas contains hydrogen.
13. The method of claim 1 , wherein (a), (b), and (c) are preformed one or more times such that periods of performing (a), (b), and (c) at least partially overlap with one another or the periods of performing (a), (b), and (c) are sequential.
14. The method of claim 1 , wherein (a) and (b) are performed such that a period of performing (a) and a period of performing (b) overlap with each other.
15. The method of claim 1 , wherein the supply of the molybdenum-containing gas is started in a state where the first reducing gas additive gas is not supplied.
16. The method of claim 1 , wherein (c) is performed after (a) and (b) are alternately performed one or more times.
17. A method of manufacturing a semiconductor device, comprising the method of claim 1 .
18. A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process comprising:
forming a molybdenum-containing film on a substrate by performing:
(a) supplying a molybdenum-containing gas to the substrate;
(b) supplying a first reducing gas to the substrate; and
(c) supplying a second reducing gas, which is different from the first reducing gas, to the substrate,
wherein (a), (b), and (c) are performed while a supply flow rate of the first reducing gas is larger than a supply flow rate of the molybdenum-containing gas and is smaller than a supply flow rate of the second reducing gas.
19. A substrate processing apparatus comprising:
a gas supply system configured to be capable of supplying a molybdenum-containing gas, a first reducing gas, and a second reducing gas, which is different from the first reducing gas, to a substrate, respectively; and
a controller configured to be capable of controlling the gas supply system to form a molybdenum-containing film on the substrate by performing:
(a) supplying the molybdenum-containing gas to the substrate;
(b) supplying the first reducing gas to the substrate; and
(c) supplying the second reducing gas to the substrate,
wherein (a), (b), and (c) are performed while a supply flow rate of the first reducing gas is larger than a supply flow rate of the molybdenum-containing gas and is smaller than a supply flow rate of the second reducing gas.