Structures for a ferroelectric field-effect transistor and related methods
Structures for a ferroelectric field-effect transistor and methods of forming a structure for a ferroelectric field-effect transistor. The structure comprises a gate stack having a ferroelectric layer, a first conductor layer, and a second conductor layer positioned in a vertical direction between the first conductor layer and the ferroelectric layer. The first conductor layer comprises a first material, the second conductor layer comprises a second material different from the first material, and the second conductor layer is in direct contact with the ferroelectric layer.
1. A structure for a ferroelectric field-effect transistor, the structure comprising:
a gate stack including a ferroelectric layer, a first conductor layer, a second conductor layer positioned in a vertical direction between the first conductor layer and the ferroelectric layer, a third conductor layer, and a fourth conductor layer positioned in the vertical direction between the third conductor layer and the first conductor layer, the first conductor layer and the third conductor layer comprising a first material, the second conductor layer and the fourth conductor layer comprising a second material different from the first material, and the second conductor layer in direct contact with the ferroelectric layer, wherein the first conductor layer is positioned within a first distance of less than or equal to 0.5 nanometers and greater than or equal to 0.1 nanometers from the ferroelectric layer, the first material is aluminum, and the second material is titanium nitride.
2. The structure of claim 1 wherein the ferroelectric layer comprises hafnium oxide.
3. A structure for a ferroelectric field-effect transistor, the structure comprising:
a gate stack including a ferroelectric layer, a first conductor layer, and a second conductor layer positioned in a vertical direction between the first conductor layer and the ferroelectric layer, the first conductor layer comprising a first material, the second conductor layer comprising a second material different from the first material, and the second conductor layer in direct contact with the ferroelectric layer,
wherein the first conductor layer is positioned within a distance of less than or equal to 0.5 nanometers and greater than or equal to 0.1 nanometers from the ferroelectric layer.
4. The structure of claim 3 wherein the second conductor layer has thickness that is equal to the distance.
5. The structure of claim 1 wherein the fourth conductor layer is thicker than the second conductor layer.
6. The structure of claim 1 further comprising:
a semiconductor substrate;
a first source/drain region in the semiconductor substrate; and
a second source/drain region in the semiconductor substrate,
wherein the gate stack is positioned on the semiconductor substrate, and the gate stack is arranged in a lateral direction between the first source/drain region and the second source/drain region.
7. The structure of claim 1 wherein the ferroelectric layer has a thickness that is greater than or equal to 5 nanometers, and the ferroelectric layer is crystalline with an orthorhombic phase that is ferroelectric.
8. A method of forming a structure for a ferroelectric field-effect transistor, the method comprising:
forming a gate stack including a ferroelectric layer, a first conductor layer, a second conductor layer positioned in a vertical direction between the first conductor layer and the ferroelectric layer, a third conductor layer, and a fourth conductor layer positioned in the vertical direction between the third conductor layer and the first conductor layer,
wherein the first conductor layer and the third conductor layer comprise a first material, the second conductor layer and the fourth conductor layer comprise a second material different from the first material, the first conductor layer is positioned within a first distance of less than or equal to 0.5 nanometers and greater than or equal to 0.1 nanometers from the ferroelectric layer, the first material is aluminum, the second material is titanium nitride, and the second conductor layer is in direct contact with the ferroelectric layer.
9. The method of claim 8 wherein the ferroelectric layer comprises hafnium oxide, the first material is aluminum, and the second material is titanium nitride.
10. The method of claim 9 wherein the third conductor layer is positioned within a second distance of greater than or equal to 1.5 nanometers from the ferroelectric layer.
11. The structure of claim 1 further comprising:
a fifth conductor layer disposed on the fourth conductor layer, the fifth conductor layer comprising doped polysilicon.
12. The structure of claim 11 wherein the third conductor layer is positioned within a second distance of greater than or equal to 1.5 nanometers from the ferroelectric layer.
13. The structure of claim 11 wherein the ferroelectric layer has a thickness that is greater than or equal to 5 nanometers.
14. The structure of claim 7 wherein the third conductor layer is positioned within a second distance of greater than or equal to 1.5 nanometers from the ferroelectric layer.
15. The structure of claim 1 wherein the third conductor layer is positioned within a second distance of greater than or equal to 1.5 nanometers from the ferroelectric layer.
16. The structure of claim 3 wherein the ferroelectric layer has a thickness that is greater than or equal to 5 nanometers, and the ferroelectric layer is crystalline with an orthorhombic phase that is ferroelectric.
17. The structure of claim 3 wherein the ferroelectric layer comprises hafnium oxide.
18. The structure of claim 3 further comprising:
a semiconductor substrate;
a first source/drain region in the semiconductor substrate; and
a second source/drain region in the semiconductor substrate,
wherein the gate stack is positioned on the semiconductor substrate, and the gate stack is arranged in a lateral direction between the first source/drain region and the second source/drain region.