Gate structure and semiconductor device having the same
Provided are a gate structure and a method of forming the same. The gate structure includes a gate dielectric layer, a metal layer, and a cluster layer. The metal layer is disposed over the gate dielectric layer. The cluster layer is sandwiched between the metal layer and the gate dielectric layer, wherein the cluster layer at least includes an amorphous silicon layer, an amorphous carbon layer, or an amorphous germanium layer. In addition, a semiconductor device including the gate structure is provided.
1. A gate structure, comprising:
a metal layer disposed over a gate dielectric layer;
a cluster layer sandwiched between the metal layer and the gate dielectric layer, wherein the cluster layer comprises a amorphous silicon layer; and
a TiON layer disposed between the metal layer and the cluster layer.
2. The gate structure of claim 1 , wherein the cluster layer comprises:
a work function metal layer disposed on the gate dielectric layer;
a barrier layer disposed on the work function metal layer;
a glue layer disposed over the barrier layer; and
a first cap layer sandwiched between the barrier layer and the glue layer, wherein the first cap layer comprises a first amorphous silicon layer, a first amorphous carbon layer, or a first amorphous germanium layer.
3. The gate structure of claim 2 , wherein the cluster layer further comprises a plurality of silicon-nitrogen (Si—N) bonds, a plurality of carbon-nitrogen (C—N) bonds, or a plurality of germanium-nitrogen (Ge—N) bonds between the first cap layer and the glue layer.
4. The gate structure of claim 2 , wherein the work function metal layer comprises a N-type work function metal layer, and the N-type work function metal layer comprises Ti, Al, TiAl, TiAlN, TiAlC, Ta, TaC, TaCN, TaSiN, or a combination thereof.
5. The gate structure of claim 2 , wherein the glue layer comprises an in-situ glue layer and the in-situ glue layer is in direct contact with the first cap layer.
6. The gate structure of claim 2 , wherein the cluster layer further comprises a second cap layer disposed between the work function metal layer and the barrier layer, and the second cap layer comprises a second amorphous silicon layer, a second amorphous carbon layer, or a second amorphous germanium layer.
7. The gate structure of claim 1 , wherein the cluster layer comprises:
a work function metal layer disposed on the gate dielectric layer;
a barrier layer disposed on the work function metal layer;
a glue layer disposed on the barrier layer; and
a cap layer sandwiched between the work function metal layer and the barrier layer, wherein the cap layer comprises the amorphous silicon layer, the amorphous carbon layer, or the amorphous germanium layer.
8. The gate structure of claim 2 , wherein the TiON layer is disposed between the metal layer and the glue layer.
9. The gate structure of claim 2 , wherein the gate dielectric layer comprises an interface layer and a high-k dielectric layer on the interface layer, and the high-k dielectric layer is in direct contact with the work function metal layer.
10. A semiconductor device, comprising:
a substrate comprising at least one fin thereon;
a gate structure covering a portion of the at least one fin, wherein the gate structure comprises a gate dielectric layer contacting the at least one fin, a metal layer, and a cluster layer sandwiched between the metal layer and the gate dielectric layer, wherein the cluster layer comprises:
a work function metal layer disposed on the gate dielectric layer;
a barrier layer disposed on the work function metal layer;
a glue layer disposed over the barrier layer; and
a first cap layer sandwiched between the barrier layer and the glue layer, wherein the first cap layer comprises a group IVA element and a plurality of silicon-nitrogen (Si—N) bonds, a plurality of carbon-nitrogen (C—N) bonds, or a plurality of germanium-nitrogen (Ge—N) bonds are included between the first cap layer and the glue layer;
source/drain (S/D) regions disposed on opposite sides of the at least one fin with respect to the gate structure; and
a TiON layer disposed between the metal layer and the glue layer.
11. The semiconductor device of claim 10 , wherein the FinFET comprises a N-type metal oxide semiconductor (NMOS) FinFET, the work function metal layer comprises a N-type work function metal layer, and the N-type work function metal layer comprises Ti, Al, TiAl, TiAlN, TiAlC, Ta, TaC, TaCN, TaSiN, or a combination thereof.
12. The semiconductor device of claim 10 , wherein the first cap layer includes a first amorphous silicon layer, a first amorphous carbon layer, or a first amorphous germanium layer.
13. The semiconductor device of claim 10 , wherein the cluster layer further comprises a second cap layer disposed between the work function metal layer and the barrier layer, and the second cap layer comprises a second amorphous silicon layer, a second amorphous carbon layer, or a second amorphous germanium layer.
14. The semiconductor device of claim 10 , wherein the glue layer comprises an in-situ glue layer and the in-situ glue layer is in direct contact with the first cap layer.
15. The semiconductor device of claim 10 , wherein the gate dielectric layer comprises an interface layer and a high-k dielectric layer on the interface layer, and the high-k dielectric layer is in direct contact with the work function metal layer.
16. A gate structure, comprising:
a metal layer disposed over a gate dielectric layer;
a cluster layer sandwiched between the metal layer and the gate dielectric layer, wherein the cluster layer at least comprises:
a work function metal layer disposed on the gate dielectric layer;
a barrier layer disposed on the work function metal layer;
a first cap layer disposed on the barrier layer; and
a glue layer disposed over the first cap layer, wherein the work function metal layer is in direct contact with the gate dielectric layer, the first cap layer is in direct contact with the barrier layer and the glue layer, and the first cap layer comprises a first amorphous layer with a group IVA element; and
a TiON layer disposed between the metal layer and the glue layer.
17. The gate structure of claim 16 , wherein the glue layer comprises an in-situ glue layer and the in-situ glue layer is in direct contact with the first cap layer.
18. The gate structure of claim 16 , wherein the gate dielectric layer comprises an interface layer and a high-k dielectric layer on the interface layer, and the high-k dielectric layer is in direct contact with the work function metal layer.
19. The gate structure of claim 16 , wherein a plurality of silicon-nitrogen (Si—N) bonds, a plurality of carbon-nitrogen (C—N) bonds, or a plurality of germanium-nitrogen (Ge—N) bonds are included between the first cap layer and the glue layer.
20. The gate structure of claim 16 , wherein the work function metal layer comprises a N-type work function metal layer, and the N-type work function metal layer comprises Ti, Al, TiAl, TiAlN, TiAlC, Ta, TaC, TaCN, TaSiN, or a combination thereof.