IP Library › Granted Patent US 12,198,953
Granted Patent B2
US 12,198,953 · App. 18/338,981 · Granted Jan 14, 2025

System and method for operating the same

Inventors: Jia-Rong Xiao (Taoyuan, TW); Wei-Hsiang Huang (Hsinchu County, TW); Sen-Yeo Peng (Hsinchu County, TW); Chui-Ya Peng (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H01L21/67253H01L21/67057
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Quick Facts
Patent No.
US 12,198,953
App. No.
18/338,981
Granted
Jan 14, 2025
Kind
B2
Abstract

A system includes a cooler, a concentration meter, a first pump and a second pump. The cooler is configured to cool first liquid by second liquid in the cooler. The concentration meter is configured to measure a concentration of the first liquid. The first pump is configured to move the first liquid according to the concentration. The second pump is coupled to the cooler, disposed with the first pump in a parallel manner, and configured to move the second liquid.

Claims (79)

1. A method, comprising:

comparing a temperature of first liquid with a predetermined temperature;

when the temperature is lower than or equal to the predetermined temperature, flowing the first liquid through a heater and a first valve to a tank;

when the temperature is higher than the predetermined temperature, filtering the first liquid by a filter;

when the temperature is higher than the predetermined temperature, cooling the first liquid by a cooler; and

when the temperature is not higher than the predetermined temperature, controlling the first valve by a pipe coupled between the cooler and the first valve,

wherein the filter and the first valve are coupled in parallel between the heater and the tank.

2. The method of claim 1 , further comprising:

bypassing the first liquid through the first valve to the tank.

3. The method of claim 1 , further comprising:

blowing air inside a housing of the cooler by a fan; and

measuring the first liquid by a concentration meter,

wherein the fan is disposed by a side of the concentration meter to keep away the fan from the heater.

4. The method of claim 3 , further comprising:

moving second liquid in the cooler by a pump for cooling the first liquid,

wherein the pump is disposed adjacent to the concentration meter.

5. The method of claim 1 , wherein a first terminal of the filter is coupled to the heater,

a second terminal of the filter is coupled to the tank,

a first terminal of the first valve is coupled to the first terminal of the filter, and

a second terminal of the first valve is coupled to the second terminal of the filter.

6. The method of claim 1 , further comprising:

when the first liquid in the tank is lower than or equal to the predetermined temperature, closing a second valve and opening a third valve to flow the first liquid through the third valve to the heater,

wherein a first terminal of the second valve is coupled to a first terminal of the third valve, and

a second terminal of the second valve is coupled to the filter, and

a second terminal of the third valve is coupled to the heater.

7. The method of claim 6 , further comprising:

when the first liquid in the tank is higher than the predetermined temperature, opening the second valve and closing the third valve to flow the first liquid through the second valve into the filter.

8. A method, comprising:

comparing a temperature of first liquid with a predetermined temperature;

when the temperature is lower than or equal to the predetermined temperature, flowing the first liquid through a heater and a valve to a tank;

when the temperature is higher than the predetermined temperature, filtering the first liquid by a filter;

when the temperature is higher than the predetermined temperature, cooling the first liquid by second liquid in a cooler;

when the temperature is not higher than the predetermined temperature, controlling the valve by a pipe coupled between the cooler and the valve;

moving the first liquid according to a concentration of the first liquid by a first pump; and

moving the second liquid by a second pump which is disposed with the first pump in a parallel manner.

9. The method of claim 8 , further comprising:

measuring the concentration by a concentration meter which is disposed adjacent to the second pump.

10. The method of claim 9 , further comprising:

conveying the first liquid by a tube which is coupled to the concentration meter; and

blowing air inside a housing by a fan,

wherein the housing covers the tube and is disposed by a side of the concentration meter.

11. The method of claim 10 , further comprising:

the first liquid flowing into the tube along a first direction and flowing out from the tube along a second direction,

wherein the housing and the fan are arranged along the second direction, and

the first direction and the second direction are approximately perpendicular to each other.

12. The method of claim 8 , further comprising:

conveying air to the cooler for cooling the first liquid.

13. The method of claim 12 , further comprising:

containing the first liquid by the tank;

controlling the valve by the air; and

bypassing the first liquid through the valve into the tank.

14. The method of claim 13 , wherein

a first terminal of the filter is coupled to the heater,

a second terminal of the filter is coupled to the tank,

a first terminal of the valve is coupled to the first terminal of the filter, and

a second terminal of the valve is coupled to the second terminal of the filter.

15. The method of claim 8 , wherein

moving, by the first pump, the second liquid in the cooler for cooling the first liquid.

16. A method, comprising:

comparing a temperature of first liquid with a predetermined temperature;

when the temperature is lower than or equal to the predetermined temperature, flowing the first liquid through a heater and a valve to a tank;

when the temperature is higher than the predetermined temperature, filtering the first liquid by a filter;

when the temperature is higher than the predetermined temperature, cooling the first liquid by a cooler;

when the temperature is not higher than the predetermined temperature, controlling the valve by air which is conveyed by a pipe;

conveying the first liquid by a tube; and

conveying, by the pipe, the air to the cooler for cooling the first liquid,

wherein the cooler covers the tube.

17. The method of claim 16 , wherein two terminals of the filter are coupled to two terminals of the valve, respectively.

18. The method of claim 16 , further comprising:

blowing air inside a housing by a fan,

wherein the fan covers the tube,

the first liquid flows into the tube along a first direction and flows out from the tube along a second direction,

the housing and the fan are arranged in order along the second direction, and

the first direction and the second direction are approximately perpendicular to each other.

19. The method of claim 16 , further comprising:

containing the first liquid by the tank; and

bypassing the first liquid through the valve into the tank.

20. The method of claim 19 , further comprising:

moving second liquid in the cooler for cooling the first liquid.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 29, 2023
From: XIAO, JIA-RONG; HUANG, WEI-HSIANG; PENG, SEN-YEO; PENG, CHUI-YA
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 064120/0016 →
Continuity (4)
Continuation 17576994 · Jan 16, 2022
Division 16510552 · Jul 12, 2019
Provisional Application 62733627 · Sep 20, 2018
Related Publication 20230343617A1 · Oct 26, 2023
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