IP Library › Granted Patent US 12,204,146
Granted Patent B2
US 12,204,146 · App. 17/869,065 · Granted Jan 21, 2025

Waveguide crossings with a free space propagation region

Inventor: Yusheng Bian (Ballston Lake, NY)
Assignee: GlobalFoundries U.S. Inc.
G02B6/125G02B6/1228G02B6/136G02B2006/12061
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Quick Facts
Patent No.
US 12,204,146
App. No.
17/869,065
Granted
Jan 21, 2025
Kind
B2
Abstract

Structures for a waveguide crossing and methods of forming such structures. The structure comprises a first waveguide core including a first section, a second section, and a first longitudinal axis. The first section and the second section are aligned along the first longitudinal axis, the first section is terminated by a first end, the second section is terminated by a second end, and the first end of the first section is longitudinally spaced from the second end of the second section by a gap. The structure further comprises a second waveguide core having a second longitudinal axis angled relative to the first longitudinal axis. The second longitudinal axis of the second waveguide core crosses the first longitudinal axis of the first waveguide core within the gap.

Claims (33)

1. A structure for a waveguide crossing, the structure comprising:

a substrate;

a first waveguide core including a first section, a second section, and a first longitudinal axis, the first section and the second section aligned along the first longitudinal axis, the first section terminated by a first end, the second section terminated by a second end, and the first end of the first section longitudinally spaced from the second end of the second section by a first gap; and

a second waveguide core including a third section, a fourth section, and a second longitudinal axis angled relative to the first longitudinal axis, the first waveguide core positioned in a vertical direction between the second waveguide core and the substrate, the third section and the fourth section aligned along the second longitudinal axis, the third section terminated by a third end, the fourth section terminated by a fourth end, the third end of the third section longitudinally spaced from the fourth end of the fourth section by a second gap, the second longitudinal axis crossing the first longitudinal axis within the first gap, and the second gap overlapping with the first gap.

2. The structure of claim 1 further comprising:

a dielectric layer positioned in the vertical direction between the first waveguide core and the second waveguide core, the dielectric layer comprising a dielectric material,

wherein the first gap is filled by the dielectric material.

3. The structure of claim 1 wherein the waveguide crossing is an element included in an array of waveguide crossings.

4. The structure of claim 1 wherein the second waveguide core has a width dimension, and the first gap is wider than the width dimension of the second waveguide core.

5. The structure of claim 1 wherein the first section has a first width dimension that increases with increasing distance from the first end, and the second section has a second width dimension that increases with increasing distance from the second end.

6. The structure of claim 1 wherein the first end of the first section and the second end of the second section are slanted relative to the first longitudinal axis.

7. The structure of claim 1 wherein the first section of the first waveguide core includes a first plurality of segments positioned in a first spaced-apart arrangement along the first longitudinal axis, and the second section of the first waveguide core includes a second plurality of segments positioned in a second spaced-apart arrangement along the first longitudinal axis.

8. The structure of claim 7 wherein the first plurality of segments comprise a first subwavelength grating, and the second plurality of segments comprise a second subwavelength grating.

9. The structure of claim 1 wherein the first waveguide core is separated in the vertical direction from the second waveguide core by a spacing, and the spacing is in a range of 1 nanometer to 500 nanometers.

10. The structure of claim 1 wherein the first waveguide core comprises a first material, and the second waveguide core comprises a second material different from the first material.

11. The structure of claim 1 wherein the first gap is configured for the transfer of light by free space propagation between the first section and the second section.

12. The structure of claim 1 wherein the second gap is configured for the transfer of light by free space propagation between the third section and the fourth section.

13. The structure of claim 1 wherein the first waveguide core has a width dimension, and the second gap is wider than the width dimension of the first waveguide core.

14. The structure of claim 1 wherein the first waveguide core has a first width dimension, and the second gap is wider than the first width dimension of the first waveguide core.

15. The structure of claim 14 wherein the second waveguide core has a second width dimension, and the first gap is wider than the second width dimension of the second waveguide core.

16. A structure for a waveguide crossing, the structure comprising:

a dielectric layer;

a first waveguide core positioned below the dielectric layer, the first waveguide core including a section terminated by a first end and aligned along a first longitudinal axis;

a second waveguide core positioned above the dielectric layer, the second waveguide core including a section terminated by a second end and aligned along a second longitudinal axis that is parallel to the first longitudinal axis, and the second end longitudinally spaced from the first end by a first gap;

a third waveguide core positioned below the dielectric layer, the third waveguide core including a section terminated by a third end and aligned along a third longitudinal axis; and

a fourth waveguide core positioned above the dielectric layer, the fourth waveguide core including a section terminated by a fourth end and aligned along a fourth longitudinal axis that is parallel to the third longitudinal axis, and the fourth end longitudinally spaced from the third end by a second gap,

wherein the first longitudinal axis and the second longitudinal axis are angled relative to the third longitudinal axis and the fourth longitudinal axis.

17. The structure of claim 16 wherein the first waveguide core and the third waveguide core comprise a first material, and the second waveguide core and the fourth waveguide core comprise a second material different from the first material.

18. The structure of claim 16 wherein the waveguide crossing is an element included in an array of waveguide crossings.

19. A method of forming a structure for a waveguide crossing, the method comprising:

forming a first waveguide core including a first section, a second section, and a first longitudinal axis, wherein the first section and the second section are aligned along the first longitudinal axis, the first section is terminated by a first end, the second section is terminated by a second end, and the first end of the first section is longitudinally spaced from the second end of the second section by a first gap; and

forming a second waveguide core including a third section, a fourth section, and a second longitudinal axis angled relative to the first longitudinal axis, wherein the first waveguide core is positioned in a vertical direction between the second waveguide core and a substrate, the third section and the fourth section are aligned along the second longitudinal axis, the third section is terminated by a third end, the fourth section is terminated by a fourth end, the third end of the third section is longitudinally spaced from the fourth end of the fourth section by a second gap, the second longitudinal axis crosses the first longitudinal axis within the first gap, and the second gap overlaps with the first gap.

20. The method of claim 19 wherein the waveguide crossing is an element that is formed in an array of waveguide crossings.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 20, 2022
From: BIAN, YUSHENG
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 060565/0432 →
Continuity (1)
Related Publication 20240027684A1 · Jan 25, 2024
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