IP Library Granted Patent US 12,204,841
Granted Patent B2
US 12,204,841 · App. 17/650,862 · Granted Jan 21, 2025

Modeling method and apparatus, computer device and storage medium

Inventor: Kun Weng (Hefei, CN)
Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
G06F30/3947H01L23/481H01L24/05H01L25/0657H01L2224/0401H01L2224/05025H01L2224/0508H01L2224/05111H01L2224/05139H01L2224/05147H01L2224/05155H01L2225/06513H01L2225/06541
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Quick Facts
Patent No.
US 12,204,841
App. No.
17/650,862
Granted
Jan 21, 2025
Kind
B2
Abstract

A modeling method includes the following: acquiring electrical parameters of each sub-structure in a through silicon via (TSV) structure; obtaining an electrical topology network model according to a connection relationship of each TSV structure between two dies; and obtaining a simulation model for simulation based on the electrical topology network model and the electrical parameters.

Claims (53)

1. A modeling method, comprising:

acquiring electrical parameters of each sub-structure in a through silicon via (TSV) structure;

obtaining an electrical topology network model according to a connection relationship of each TSV structure between two dies; and

obtaining a simulation model for simulation based on the electrical topology network model and the electrical parameters.

2. The modeling method according to claim 1 , wherein the two dies are a first die and a second die, respectively; each sub-structure comprises a bump pad sub-structure and a TSV sub-structure, wherein an end of the bump pad sub-structure is electrically connected to the second die, another end of the bump pad sub-structure is electrically connected to an end of the TSV sub-structure; a through via is provided on the first die to allow the TSV sub-structure to pass through to electrically connect another end of the TSV sub-structure to the first die; and the electrical parameters comprise electrical parameters of the bump pad sub-structure and electrical parameters of the electrical parameters of the TSV sub-structure.

3. The modeling method according to claim 2 , wherein the acquiring electrical parameters of each sub-structure in a TSV structure comprises:

acquiring a schematic diagram of the TSV structure;

obtaining a material composition sectional view of each sub-structure in the TSV structure based on the schematic diagram of the TSV structure, wherein the material composition sectional view of the sub-structure comprises material information and dimension information of the sub-structure; and

obtaining the electrical parameters based on the material information and the dimension information of each sub-structure.

4. The modeling method according to claim 3 , wherein the electrical parameters comprise resistance parameters, capacitance parameters, and inductance parameters.

5. The modeling method according to claim 4 , wherein when there are a plurality of TSV structures between the two dies, the plurality of TSV structures are the same, and the electrical topology network model comprises a plurality of sub-network models, the amount of the plurality of sub-network models is equal to the amount of the plurality of TSV structures;

each of the plurality of sub-network models comprises a bump pad sub-resistance, a TSV resistance, a bump pad sub-capacitance, a TSV capacitance, a bump pad sub-inductance, and a TSV inductance, wherein the bump pad sub-resistance, the bump pad sub-inductance, the TSV inductance and the TSV resistance are sequentially connected in series between the second die and the first die, an end of the bump pad sub-capacitance is connected between the second die and the bump pad sub-resistance, another end of the bump pad sub-capacitance is connected to a preset distal end, an end of the TSV capacitance is connected between the bump pad sub-inductance and the TSV inductance, and another end of the TSV capacitance is connected to another TSV capacitance in the sub-network model.

6. The modeling method according to claim 5 , wherein the obtaining a simulation model for simulation based on the electrical topology network model and the electrical parameters comprises:

obtaining a simulation model file based on the sub-network model and the electrical parameters;

configuring a TSV structure symbol between a circuit model of the first die and a circuit model of the second die according to the amount of the TSV structure between the two dies to obtain a first circuit model; and

obtaining the simulation model for simulation based on the first circuit model and the simulation model file.

7. The modeling method according to claim 5 , wherein when the amount of the dies is greater than two, the obtaining a simulation model for simulation based on the electrical topology network model and the electrical parameters comprises:

obtaining a simulation model file based on the sub-network model and the electrical parameters;

configuring TSV structure symbols between all every two adjacent dies according to the amount of the TSV structure between two adjacent dies to obtain a second circuit model; and

obtaining the simulation model for simulation based on the second circuit model and the simulation model file.

8. The modeling method according to claim 3 , wherein the bump pad sub-structure comprises a first copper layer, a second copper layer, a first nickel layer, a tin-silver alloy layer, and a second nickel layer sequentially stacked, the TSV sub-structure comprises a third copper layer;

in the process of obtaining the electrical parameters based on the material information and the dimension information of each sub-structure, the electrical parameters of the bump pad sub-structure are obtained based on the material information and the dimension information of the first copper layer, the second copper layer, the first nickel layer, the tin-silver alloy layer, and the second nickel layer, and the electrical parameters of the TSV sub-structure are obtained based on the material information and the dimension information of the third copper layer.

9. The modeling method according to claim 8 , further comprising:

obtaining an optimized structure of the TSV structure according to a simulation result.

10. The modeling method according to claim 9 , wherein the obtaining an optimized structure of the TSV structure according to a simulation result comprises:

optimizing a height and/or a width of the bump pad sub-structure, optimizing a width and/or a height of the TSV sub-structure, optimizing a material composition and ratio in the bump pad sub-structure, and optimizing a spacing between each TSV structure between two of the dies.

11. The modeling method according to claim 9 , wherein the first die comprises a base material layer and a plurality of metal layers, wherein the plurality of metal layers are sequentially stacked below the base material layer, a through via is provided on the base material layer to allow the TSV sub-structure to pass through, and the TSV sub-structure is electrically connected to one of the plurality of metal layers,

wherein the obtaining an optimized structure of the TSV structure according to a simulation result comprises: re-determining a metal layer electrically connected to the TSV sub-structure.

12. A non-transitory computer-readable storage medium having a computer program stored thereon, and the computer program implementing the processes in the method according to claim 1 when executed by a processor.

13. A modeling apparatus, comprising:

an acquisition circuit, configured to acquire electrical parameters of each sub-structure in a through silicon via (TSV) structure;

an electrical topology network model processor, configured to obtain an electrical topology network model according to a connection relationship of each TSV structure between two dies; and

a simulation model processor, configured to obtain a simulation model for simulation based on the electrical topology network model and the electrical parameters.

14. The modeling apparatus according to claim 13 , wherein the two die sheets are a first die and a second die, respectively; each sub-structure comprises a bump pad sub-structure and a TSV sub-structure, wherein an end of the bump pad sub-structure is electrically connected to the second die, another end of the bump pad sub-structure is electrically connected to an end of the TSV sub-structure; a through via is provided on the first die to allow the TSV sub-structure to pass through to electrically connect another end of the TSV sub-structure to the first die; and the electrical parameters comprise electrical parameters of the bump pad sub-structure and electrical parameters of the TSV sub-structure.

15. The modeling apparatus according to claim 14 , wherein the acquisition circuit is further configured to:

acquire a schematic diagram of the TSV structure;

obtain a material composition sectional view of each sub-structure in the TSV structure based on the schematic diagram of the TSV structure, wherein the material composition sectional view of the sub-structure comprises material information and dimension information of the sub-structure; and

obtain the electrical parameters based on the material information and the dimension information of each sub-structure.

16. The modeling apparatus according to claim 15 , wherein the electrical parameters comprise resistance parameters, capacitance parameters, and inductance parameters.

17. The modeling apparatus according to claim 16 , wherein when there are a plurality of TSV structures between the two dies, the plurality of TSV structures are the same, and the electrical topology network model comprises a plurality of sub-network models, the amount of the plurality of sub-network models is equal to the amount of the plurality of TSV structures;

each of the plurality of sub-network models comprises a bump pad sub-resistance, a TSV resistance, a bump pad sub-capacitance, a TSV capacitance, a bump pad sub-inductance, and a TSV inductance, wherein the bump pad sub-resistance, the bump pad sub-inductance, the TSV inductance and the TSV resistance are sequentially connected in series between the second die and the first die, an end of the bump pad sub-capacitance is connected between the second die and the bump pad sub-resistance, another end of the bump pad sub-capacitance is connected to a preset distal end, an end of the TSV capacitance is connected between the bump pad sub-inductance and the TSV inductance, and another end of the TSV capacitance is connected to another TSV capacitance in the sub-network model.

18. The modeling apparatus according to claim 17 , wherein the simulation model processor is further configured to:

obtain a simulation model file based on the sub-network model and the electrical parameters;

configure a TSV structure symbol between a circuit model of the first die and a circuit model of the second die according to the amount of the TSV structure between the two dies to obtain a first circuit model; and

obtain the simulation model for simulation based on the first circuit model and the simulation model file.

19. The modeling apparatus according to claim 17 , wherein when the amount of the dies is greater than two, the simulation model processor is further configured to:

obtain a simulation model file based on the sub-network model and the electrical parameters;

configure TSV structure symbols between all every two adjacent dies according to the amount of the TSV structure between two adjacent dies to obtain a second circuit model; and

obtain the simulation model for simulation based on the second circuit model and the simulation model file.

20. A computer device comprising a memory and a processor, the memory storing a computer program, the processor, when executing the computer program, implements operations comprising:

acquiring electrical parameters of each sub-structure in a through silicon via (TSV) structure;

obtaining an electrical topology network model according to a connection relationship of each TSV structure between two dies; and

obtaining a simulation model for simulation based on the electrical topology network model and the electrical parameters.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 14, 2022
From: WENG, KUN
To: CHANGXIN MEMORY TECHNOLOGIES, INC.
Reel/Frame 058997/0454 →
Priority Claims (1)
CN 202110554254.8 · May 20, 2021 · national
Continuity (2)
Continuation PCTCN2021120533 · Sep 26, 2021
Related Publication 20220374580A1 · Nov 24, 2022
References Cited (15)
US 8959009B1 · Sercu · 2015 [cited by applicant]
US 9633149B2 · Yen · 2017 [cited by applicant]
US 11164770B1 · Or-Bach · 2021 [cited by examiner]
US 20120129301A1 · Or-Bach · 2012 [cited by examiner]
US 20130246990A1 · Yen · 2013 [cited by applicant]
US 20180006006A1 · Kim · 2018 [cited by examiner]
US 20210090983A1 · Lin · 2021 [cited by examiner]
CN 103310070A · 2013 [cited by applicant]
CN 103839921B · 2016 [cited by applicant]
CN 103310031B · 2017 [cited by applicant]
CN 107564894A · 2018 [cited by examiner]
CN 109657305A · 2019 [cited by applicant]
CN 111783376A · 2020 [cited by examiner]
JP 2014072499A · 2014 [cited by examiner]
JP 2020009992A · 2020 [cited by examiner]