Integrated circuit including backside conductive vias
An integrated circuit includes a first chip bonded to a second chip. The first chip includes gate all around transistors on a substrate. The first chip includes backside conductive vias extending through the substrate to the gate all around transistors. The second chip includes electronic circuitry electrically connected to the transistors by the backside conductive vias.
1. An integrated circuit, comprising:
a first chip including:
a substrate including:
a first semiconductor layer;
an etch-stop layer on the first semiconductor layer; and
a second semiconductor layer on the etch-stop layer
a first gate all around transistor on the substrate and having a source region; and
a backside conductive via extending through the substrate to the source region, wherein the conductive via extends through the first semiconductor layer, the etch-stop layer, and the second semiconductor layer.
2. The integrated circuit of claim 1 , wherein the etch-stop layer is selectively etchable with respect to the first and second semiconductor layers.
3. The integrated circuit of claim 2 , wherein the etch-stop layer is a dielectric layer.
4. The integrated circuit of claim 3 , wherein the etch-stop layer is a third semiconductor layer.
5. The integrated circuit of claim 1 , further comprising a second chip bonded to the first chip and including:
electronic circuitry; and
a metal structure in contact with the backside via and electrically connecting the gate all around transistor to the electronic circuitry.
6. The integrated circuit of claim 1 , wherein the electrical circuitry includes a memory array.
7. The integrated circuit of claim 1 , wherein the first chip includes a second gate all around transistor sharing the source region of the first gate all around transistor.
8. The integrated circuit of claim 1 , wherein the first chip includes:
a second gate all around transistor having a source region;
a shallow trench isolation separating the source region of the first gate all around transistor and the source region of the second gate all around transistor, wherein the backside conductive via contacts the source region of the first gate all around transistor and the source region of the second gate all around transistor.
9. An integrated circuit, comprising:
a first chip including:
a substrate including:
a first semiconductor layer;
an etch-stop layer on the first semiconductor layer; and
a second semiconductor layer on the etch-stop layer;
a first gate all around transistor on the substrate and including a source/drain region;
a backside conductive via extending through the substrate to the source/drain region of the first gate all around transistor.
10. The integrated circuit of claim 9 , comprising a second chip bonded to the first chip.
11. The integrated circuit of claim 10 , the second chip includes a metal structure electrically coupled to the backside conductive via.
12. The integrated circuit of claim 9 , wherein a thickness of the substrate is less than 10 μm.
13. The device of claim 9 , further comprising:
a second gate all around transistor on the semiconductor substrate; and
a shallow trench isolation between the source region of the first gate all around transistor and a source/drain region of the second gate all around transistor, wherein the backside conductive via contacts the source/drain regions of both the first and second gate all around transistors.
14. The device of claim 9 , comprising a silicide on the source/drain region.
15. A device, comprising:
a first chip including:
a semiconductor substrate including a first semiconductor layer, a second semiconductor layer, and an etch-stop layer between the first semiconductor layer and the second semiconductor layer;
a first gate all around transistor on a semiconductor substrate and including a first source/drain region;
a second gate all around transistor on the semiconductor substrate and including a second source/drain region; and
a backside conductive via extending through the semiconductor substrate and electrically contacting the first source/drain region and the second source/drain region of the first gate all around transistor.
16. The device of claim 15 , comprising a second chip bonded to the semiconductor substrate.
17. The device of claim 15 , wherein the first chip includes a dielectric layer on the semiconductor substrate opposite the first gate all around transistor, wherein the backside conductive via extends through the dielectric layer.
18. The device of claim 15 , comprising a first silicide on the first source/drain region and a second silicide on the second source/drain region, wherein the backside conductive via is in contact with both the first silicide and the second silicide.
19. The deice of claim 15 , wherein the etch-stop layer is selectively etchable with respect to the first and second semiconductor layers.
20. The deice of claim 9 , wherein the etch-stop layer is selectively etchable with respect to the first and second semiconductor layers.