Light emitting device and manufacturing method thereof
Provided is a light emitting device including a buffer layer, a body provided on the buffer layer, the body including a first semiconductor layer, an active layer, and a second semiconductor layer, a reflective layer configured to reflect light incident from the active layer, and a scattering pattern provided between the first semiconductor layer and the buffer layer, the scattering pattern being configured to scatter the light incident from the active layer and light incident from the reflective layer.
1. A light emitting device comprising:
a buffer layer;
a body provided on the buffer layer, the body comprising a first semiconductor layer, an active layer, and a second semiconductor layer;
a reflective layer configured to reflect light incident from the active layer;
a scattering pattern provided in the first semiconductor layer, the scattering pattern being configured to scatter the light incident from the active layer and light incident from the reflective layer; and
a plurality of cavities contacting the scattering pattern and the buffer layer, the cavities containing air,
wherein the reflective layer is provided on an entire upper surface of the second semiconductor layer and configured to reflect the light emitted upward from the active layer downward, and
wherein a refractive index of the scattering pattern is lower than a refractive index of the first semiconductor layer.
2. The light emitting device of claim 1 ,
wherein at least one side of the scattering pattern is direct contact with the buffer layer, and the other sides of the scattering pattern are direct contact with the first semiconductor layer.
3. The light emitting device of claim 1 , wherein the scattering pattern includes a dielectric material having a permittivity of 4 or less.
4. The light emitting device of claim 1 , wherein the scattering pattern includes at least one of aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ), silicon nitride (Si 3 N 4 ), titanium oxide (TiO 2 ), magnesium oxide (MgO), magnesium fluoride (MgF 2 ), stannic oxide (SnO 2 ), tantalum dioxide (TaO 2 ), zinc sulfide (ZnS), or ceric oxide (CeO 2 ).
5. The light emitting device of claim 1 , wherein a thickness of the scattering pattern is 10 nm to 1 μm.
6. The light emitting device of claim 1 , wherein the scattering pattern includes a crystallized material.
7. The light emitting device of claim 1 , wherein one of the first semiconductor layer and the second semiconductor layer is a p-type semiconductor layer, and the other of the first semiconductor layer and the second semiconductor layer is an n-type semiconductor layer.
8. The light emitting device of claim 1 , wherein the active layer has a multi-quantum well (MQW) structure, and
wherein the active layer includes a quantum barrier layer comprising gallium nitride (GaN) and a quantum well layer comprising In x Ga 1-x N (0≤x≤1).
9. The light emitting device of claim 1 , wherein the reflective layer includes at least one of gold (Au), silver (Ag), or aluminum (Al).
10. The light emitting device of claim 1 , wherein the buffer layer includes aluminum nitride (AlN).
11. A display device comprising:
a display layer comprising a plurality of light emitting devices; and
a driving layer comprising a plurality of transistors electrically connected to the plurality of light emitting devices, respectively, and the driving layer being configured to drive the plurality of light emitting devices,
wherein at least one of the plurality of light emitting devices comprises:
a buffer layer;
a body provided on the buffer layer, the body comprising a first semiconductor layer, an active layer, and a second semiconductor layer;
a reflective layer configured to reflect light incident from the active layer;
a scattering pattern is provided in the first semiconductor layer, the scattering pattern being configured to scatter the light incident from the active layer and light reflected from the reflective layer; and
a plurality of cavities contacting the scattering pattern and the buffer layer, the cavities containing air,
wherein the reflective layer is provided on an entire upper surface of the second semiconductor layer and configured to reflect the light emitted upward from the active layer downward, and
wherein a refractive index of the scattering pattern is lower than a refractive index of the first semiconductor layer.