IP Library › Granted Patent US 12,209,663
Granted Patent B2
US 12,209,663 · App. 18/215,604 · Granted Jan 28, 2025

Sealing member with lip seal

Inventors: Yao-Hung Yang (Santa Clara, CA); Chih-Yang Chang (Cupertino, CA); Sam Hyungsam Kim (San Jose, CA)
Assignee: Applied Materials, Inc.
F16J15/062F16J15/025F16J15/102
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,209,663
App. No.
18/215,604
Granted
Jan 28, 2025
Kind
B2
Abstract

A sealing member includes a monolithic body including a first portion adjoining a second portion. The first portion forms part of a circle. The second portion includes first and second lobes. Each lobe adjoins the first portion with a concave surface. In one example, each lobe includes a rounded tip, and a convex surface extends from one rounded tip to the other rounded tip.

Claims (43)

1. A sealing member, comprising:

an elongated monolithic body including a first portion adjoining a second portion;

wherein, when viewed in a coronal plane perpendicular to a direction of elongation:

the first portion forms more than half of a circle having a first radius that extends from a first concave surface to a second concave surface; and

the second portion comprises:

a first lobe including a first rounded tip, and adjoining the first concave surface;

a second lobe including a second rounded tip, and adjoining the second concave surface; and

a convex surface having a second radius greater than the first radius, and extending from the first rounded tip to the second rounded tip.

2. The sealing member of claim 1 , wherein the first and second portions are symmetrical in the coronal plane about a center axis passing through the first and second portions.

3. The sealing member of claim 1 , wherein when viewed in the coronal plane, a width of the second portion from the first rounded tip to the second rounded tip is greater than a maximum width of the first portion.

4. The sealing member of claim 1 , wherein the monolithic body is made of an elastic plasma-resistant material.

5. A sealing member, comprising:

an elongated monolithic body including a first portion adjoining a second portion;

wherein, when viewed in a coronal plane perpendicular to a direction of elongation:

the first portion includes first and second elliptical nodes;

each node includes a first major axis and a first minor axis, and extends away from the second portion along the first major axis;

the second portion includes first and second elliptical lobes;

each lobe includes a second major axis and a second minor axis, and extends away from the first portion along the second major axis;

a thickness of each node measured along the first minor axis is greater than a thickness of each lobe measured along the second minor axis; and

the second portion further comprises a convex surface extending between the first and second lobes.

6. The sealing member of claim 5 , wherein the first and second portions are symmetrical in the coronal plane about a center axis passing through the first and second portions.

7. The sealing member of claim 6 , wherein a maximum width of the second portion measured perpendicular to the center axis is greater than a maximum width of the first portion measured perpendicular to the center axis.

8. An assembly comprising:

a first component including a face with a seal groove therein;

a sealing member in the seal groove; and

a second component mounted to the first component, and including a ridge;

wherein:

the seal groove includes an opening with a first width;

the ridge includes an end with a second width less than the first width; and

the sealing member comprises:

a monolithic body elongated in a direction along the seal groove, and including:

a first portion located in the seal groove; and

an adjoining second portion protruding out of the seal groove opening and contacting the end of the ridge;

the second portion including first and second lobes, each lobe contacting the face of the first component at the opening of the seal groove; and

the end of the ridge contacts a convex surface of the second portion that adjoins the first lobe and the second lobe.

9. The assembly of claim 8 , wherein the first and second portions are symmetrical in a coronal plane about a center axis passing through the first and second portions.

10. The assembly of claim 8 , wherein each lobe contacts the end of the ridge of the second component.

11. The assembly of claim 8 , wherein the convex surface extends from a rounded tip of the first lobe to a rounded tip of the second lobe.

12. The assembly of claim 11 , wherein a radius of the first portion is less than a radius of the convex surface.

13. The assembly of claim 8 , wherein the seal groove further includes a base extending between first and second sidewalls, the base including first and second recesses separated by a raised crest, the first and second recesses extending along the seal groove.

14. The assembly of claim 13 , wherein the first portion of the seal member body further includes first and second nodes, the first node extending into the first recess, and the second node extending into the second recess.

15. The assembly of claim 14 , wherein the first node seals against the first sidewall, and the second node seals against the second sidewall.

16. The assembly of claim 14 , wherein when viewed in a coronal plane perpendicular to the direction along the seal groove, a thickness of the first node and a thickness of the second node are greater than a thickness of the first lobe and a thickness of the second lobe.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 29, 2023
From: YANG, YAO-HUNG; CHANG, CHIH-YANG; KIM, SAM HYUNGSAM
To: APPLIED MATERIALS, INC.
Reel/Frame 064112/0058 →
Continuity (2)
Provisional Application 63391836 · Jul 25, 2022
Related Publication 20240026975A1 · Jan 25, 2024
References Cited (25)
US 5482297A · Burns et al. · 1996 [cited by applicant]
US 6173970B1 · Choudary et al. · 2001 [cited by applicant]
US 6264206B1 · Hashizawa · 2001 [cited by examiner]
US 6523833B1 · Ishigaki et al. · 2003 [cited by applicant]
US 7007954B2 · Travers · 2006 [cited by examiner]
US 8181972B2 · Tsuji · 2012 [cited by examiner]
US 8414705B2 · Nakagawa · 2013 [cited by applicant]
US 9349621B2 · Singh · 2016 [cited by applicant]
US 11359722B2 · Maheshwari et al. · 2022 [cited by applicant]
US 20050001388A1 · Travers · 2005 [cited by examiner]
US 20060220326A1 · Leadley-Brown · 2006 [cited by examiner]
US 20080191474A1 · Kotz · 2008 [cited by applicant]
US 20110037228A1 · Thomas, Jr. et al. · 2011 [cited by applicant]
US 20190242480A1 · Nakagawa et al. · 2019 [cited by applicant]
US 20200025292A1 · Maheshwari et al. · 2020 [cited by applicant]
US 20200043769A1 · Bonecutter · 2020 [cited by applicant]
US 20210033193A1 · Aoki · 2021 [cited by examiner]
JP 2000356267A · 2000 [cited by applicant]
JP 2004176834A · 2004 [cited by applicant]
WO 2010008787A2 · 2010 [cited by applicant]
International Search Report and Written Opinion dated Oct. 26, 2023 for Application No. PCT/US2023/026483. [cited by applicant]
dupont.com—Kalrez® TriLobe™ Seals _ Dove-Tail Groove Configurations; (https://www.dupont.com/knowledge/kalrez-trilobe-seals.html). [cited by applicant]
gallagherseals.com—Spring Energized—Face Seals—Categories; (https://www.gallagherseals.com/categories/face-seals/spring-energized.html). [cited by applicant]
herculesus.com—MUUL-70X80X6—Hercules for o-rings, hydraulic seals, cylinders; (https://herculesus.com/product.php?productcode=MUUL-70X80X6&pd=Y&cat=15721&pid=15888). [cited by applicant]
PAI X-Ring and Multiseal brochure. [cited by applicant]