Wafer placement table
A wafer placement table includes: a ceramic substrate having a wafer placement surface at an upper surface, and incorporating an electrode; a cooling substrate which is bonded to a lower surface of the ceramic substrate, and in which a refrigerant flow path is formed; a power supply terminal connected to the electrode; and a power supply terminal hole vertically penetrating the cooling substrate and storing the power supply terminal. The power supply terminal hole intersects with the refrigerant flow path.
1. A wafer placement table comprising:
a ceramic substrate having a wafer placement surface at an upper surface, and incorporating an electrode;
a cooling substrate which is bonded to a lower surface of the ceramic substrate, and in which a refrigerant flow path is formed;
a power supply terminal connected to the electrode; and
a power supply terminal hole vertically penetrating the cooling substrate and storing the power supply terminal,
wherein the power supply terminal hole intersects with the refrigerant flow path.
2. The wafer placement table according to claim 1 ,
wherein electrically insulative liquid is supplied to the refrigerant flow path.
3. The wafer placement table according to claim 1 ,
wherein in the power supply terminal hole, an insulation pipe is disposed to support the power supply terminal by allowing the power supply terminal to pass through the insulation pipe.
4. The wafer placement table according to claim 3 ,
wherein an upper end of the insulation pipe is fixed to the ceramic substrate, and
a lateral surface of the insulation pipe has a convex section which is in contact with or disposed close to an inner wall of the power supply terminal hole.
5. The wafer placement table according to claim 1 ,
wherein the cooling substrate has a single-layered structure.
6. The wafer placement table according to claim 5 ,
wherein the refrigerant flow path has a refrigerant flow path groove provided in an upper surface or a lower surface of the cooling substrate.
7. The wafer placement table according to claim 1 ,
wherein the refrigerant flow path includes a plurality of lines each provided from one end to the other end in a one-stroke pattern in a plan view, and
the power supply terminal hole is provided in one or more of the plurality of lines.