Semiconductor device with air gap and method for preparing the same
A semiconductor device includes a bottom barrier layer disposed over a semiconductor substrate, and a conductive contact disposed over the bottom barrier layer. The semiconductor device also includes a top barrier layer disposed over the conductive contact. The bottom barrier layer, the conductive contact, and the top barrier layer form an I-shaped structure. The semiconductor device further includes an isolation layer disposed adjacent to the I-shaped structure and extending into the semiconductor substrate. An air gap is surrounded by the isolation layer.
1. A semiconductor device, comprising:
a bottom barrier layer disposed over a semiconductor substrate;
a conductive contact disposed over the bottom barrier layer;
a top barrier layer disposed over the conductive contact, wherein the bottom barrier layer, the conductive contact, and the top barrier layer form an I-shaped structure;
an isolation layer disposed adjacent to the I-shaped structure and extending into the semiconductor substrate, wherein an air gap is surrounded by the isolation layer;
a first lining layer separating the isolation layer from the top barrier layer, the conductive contact, the bottom barrier layer, and the semiconductor substrate; and
a second lining layer covering the first lining layer and the isolation layer.
2. The semiconductor device of claim 1 , wherein the isolation layer includes vanadium.
3. The semiconductor device of claim 1 , wherein the first lining layer is in direct contact with a top surface of the bottom barrier layer and a bottom surface of the top barrier layer.
4. The semiconductor device of claim 1 , wherein a material of the first lining layer is the same as a material of the second lining layer.
5. The semiconductor device of claim 1 , wherein the bottom barrier layer has a middle line, a distance between the middle line and a top surface of the bottom barrier layer is substantially equal to a distance between the middle line and a bottom surface of the bottom barrier layer, and
wherein a bottommost point of the air gap is located between the middle line and the bottom surface of the bottom barrier layer.
6. The semiconductor device of claim 1 , wherein the top barrier layer has a middle line, a distance between the middle line and a top surface of the top barrier layer is substantially equal to a distance between the middle line and a bottom surface of the top barrier layer, and
wherein a topmost point of the air gap is located between the middle line and the bottom surface of the top barrier layer.
7. A semiconductor device, comprising:
a bottom barrier layer disposed over a semiconductor substrate;
a conductive contact disposed over the bottom barrier layer;
a top barrier layer disposed over the conductive contact, wherein a width of the bottom barrier layer and a width of the top barrier layer are greater than a width of the conductive contact;
an isolation layer disposed adjacent to the conductive contact and extending into the semiconductor substrate, wherein an air gap is sealed in the isolation layer;
an anti-reflective layer disposed over the top barrier layer; and.
8. The semiconductor device of claim 7 , wherein the isolation layer includes a vanadium-containing oxide layer.
9. The semiconductor device of claim 7 , wherein a top surface of the isolation layer is concave.
10. The semiconductor device of claim 7 , wherein the width of the bottom barrier layer is substantially the same as the width of the top barrier layer.
11. The semiconductor device of claim 7 , wherein a material of the top barrier layer is the same as a material of the bottom barrier layer; wherein the top barrier layer and the conductive contact include different materials.
12. The semiconductor device of claim 7 , further comprising:
a first lining layer covering a top surface of the anti-reflective layer and separating the isolation layer from the top barrier layer, the conductive contact, the bottom barrier layer, and the semiconductor substrate.
13. The semiconductor device of claim 12 , further comprising:
a second lining layer covering the first lining layer and the isolation layer, wherein the second lining layer is separated from the anti-reflective layer by the first lining layer.