IP Library Granted Patent US 12,215,989
Granted Patent B2
US 12,215,989 · App. 17/424,159 · Granted Feb 4, 2025

Differential-pressure-based flow meters

Inventors: John Folden Stumpf (Portland, OR); Karl Frederick Leeser (West Linn, OR)
Assignee: Lam Research Corporation
G01F1/363G01F1/42
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Quick Facts
Patent No.
US 12,215,989
App. No.
17/424,159
Granted
Feb 4, 2025
Kind
B2
Abstract

Various embodiments include apparatuses and methods to form the apparatus. In one embodiment, the apparatus is a flow meter having inlet and outlet portions for transporting a fluid along a flow path. A flow-restrictor element is formed within the flow path to impart a pressure drop to the fluid. A flow sensor has a first surface of the flow sensor in direct fluid communication with fluid flowing upstream of the flow-restrictor element and a second surface, on a portion of the flow sensor opposite to the first surface, in direct fluid communication with fluid flowing downstream of the flow-restrictor element. The flow sensor senses a differential pressure in the fluid due to the at least one flow-restrictor element. Other apparatuses and systems are disclosed.

Claims (29)

1. A flow meter, comprising:

a flow path having an inlet portion and an outlet portion and configured to transport a fluid, the inlet portion and the outlet portion of the flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the inlet portion and the outlet portion;

at least one flow-restrictor element within the flow path and arranged between the inlet portion and the outlet portion of the flow path and configured to impart a pressure drop to the fluid; and

a flow sensor arranged between the inlet portion and the outlet portion of the flow path, a first surface of the flow sensor is configured to be in direct fluid communication with the fluid that is flowing upstream of the at least one flow-restrictor element, a second surface on a portion of the flow sensor opposite to the first surface of the flow sensor is configured to be in direct fluid communication with the fluid that is flowing downstream of the at least one flow-restrictor element, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one flow-restrictor element.

2. The flow meter of claim 1 , wherein the at least one flow-restrictor element comprises a laminar flow element.

3. The flow meter of claim 1 , wherein the at least one flow-restrictor element comprises an orifice.

4. The flow meter of claim 1 , wherein the at least one flow-restrictor element comprises a plurality of orifices.

5. The flow meter of claim 1 , wherein the inlet portion and the outlet portion of the flow path are arranged at angles that are about 0° to about 45° apart.

6. The flow meter of claim 1 , wherein the inlet portion and the outlet portion of the flow path are arranged at angles that are about 45° to about 60° apart.

7. The flow meter of claim 1 , further comprising a first bend in the flow path that is upstream to the at least one flow-restrictor element and a second bend that is downstream from the at least one flow-restrictor element.

8. The flow meter of claim 7 , wherein at least one of the first bend and the second bend are at least five-to-seven characteristic linear dimensions away from the at least one flow-restrictor element, the characteristic linear dimension being based on an internal dimension of the flow path.

9. The flow meter of claim 1 , wherein the flow sensor is a differential pressure sensor.

10. The flow meter of claim 1 , wherein a turndown ratio of the flow meter is at least about 100:1.

11. A flow meter, comprising:

a flow path having an inlet portion and an outlet portion and configured to transport a fluid, the flow path having a single bend formed therein, the inlet portion and the outlet portion of the flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the inlet portion and the outlet portion;

at least one flow-restrictor element within the flow path and arranged between the inlet portion and the outlet portion of the flow path and configured to impart a pressure drop to the fluid; and

at least one flow sensor arranged at a different portion where the at least one flow sensor is arranged in a direction of a fluid flow having a first surface and a second surface opposite the first surface, the first surface of the flow sensor being configured to be in direct fluid communication with the fluid that is flowing upstream of the at least one flow-restrictor element, the second surface being configured to be in direct fluid communication with the fluid that is flowing downstream of the at least one flow-restrictor element, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one flow-restrictor element.

12. The flow meter of claim 11 , wherein the at least one restrictor element is located within the single bend in the flow path.

13. The flow meter of claim 11 , wherein the at least one flow-restrictor element is a laminar-flow element.

14. The flow meter of claim 11 , wherein the at least one flow-restrictor is a plate configured transverse to a direction of fluid flow having at least one orifice formed therethrough.

15. The flow meter of claim 11 , wherein the single bend in the flow path has a reduced cross-sectional area as compared with a cross-sectional area of remaining portions of the flow path, the at least one flow-restrictor comprising the reduced cross-sectional area.

16. The flow meter of claim 11 , wherein a cross-sectional area of the inlet portion of the flow path is greater than a cross-sectional area of the outlet portion of the flow path.

17. The flow meter of claim 11 , wherein a cross-sectional area of the outlet portion of the flow path is greater than a cross-sectional area of the inlet portion of the flow path.

18. The flow meter of claim 11 , wherein the flow meter is configured to have no dead volumes located therein.

19. A flow meter, comprising:

an upstream portion flow path and a downstream portion flow path to transport a fluid, the upstream portion flow path and the downstream portion flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the upstream portion flow path and the downstream portion flow path;

a flow-sensor carrier arranged transverse to a direction of the transported fluid and between the upstream portion flow path and the downstream portion flow path;

at least one orifice formed through the flow-sensor carrier in substantially a same direction as a direction of the fluid, the at least one orifice to provide a pressure drop between the upstream portion flow path and the downstream portion flow path; and

a flow sensor formed within the flow-sensor carrier and having a first surface and a second surface opposite the first surface, the first surface of the flow sensor being configured to be in direct fluid communication with the fluid that is flowing upstream of the flow-sensor carrier and the second surface of the flow sensor being configured to be in direct fluid communication with the fluid that is flowing downstream of the flow-sensor carrier, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one orifice.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 23, 2021
From: STUMPF, JOHN FOLDEN; LEESER, KARL FREDERICK
To: LAM RESEARCH CORPORATION
Reel/Frame 056957/0988 →
Continuity (2)
Provisional Application 62796969 · Jan 25, 2019
Related Publication 20220107212A1 · Apr 7, 2022
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