Liquid ejection head
A liquid ejection head includes a first substrate having a first surface and a second surface opposite the first surface, the first surface having a structure, a second substrate having a second surface facing the first surface of the first substrate, and a third substrate having a first surface facing the second surface of the first substrate. The first, second, and third substrates are joined together by an adhesive. The second surface of the first substrate has an opening located in a region on a rear side of the structure and having corners each having a curvature radius R 2 . The second surface of the second substrate has an opening in a region facing the structure and having corners each having a curvature radius R 1 . The curvature radii R 1 and R 2 satisfy R 1 <R 2.
1. A liquid ejection head comprising:
a first substrate having a first surface and a second surface opposite the first surface, the first surface having a structure;
a second substrate having a second surface facing the first surface of the first substrate; and
a third substrate having a first surface facing the second surface of the first substrate,
the first substrate and the second substrate being joined together by an adhesive located between the first surface of the first substrate and the second surface of the second substrate,
the first substrate and the third substrate being joined together by the adhesive located between the second surface of the first substrate and the first surface of the third substrate,
the second surface of the first substrate having an opening that is located in a region on a rear side of the structure and that has corners each having a curvature radius R 2 ,
the second surface of the second substrate having an opening that is located in a region facing the structure and that has corners each having a curvature radius R 1 ,
the curvature radii R 1 and R 2 satisfying R 1 <R 2 ,
wherein
the second substrate further has a through-hole extending through the second substrate and including a stepped portion,
the through-hole including the stepped portion has an opening that is located at the second surface of the second substrate and that has corners each having a curvature radius R 3 , and
the curvature radii R 1 , R 2 , and R 3 satisfy R 3 ≤R 1 <R 2 .
2. The liquid ejection head according to claim 1 , wherein the opening at the second surface of the first substrate and the third substrate define a space that serves as a pressure chamber.
3. The liquid ejection head according to claim 1 , wherein
the third substrate further has an ejection port for liquid ejection and a liquid ejection passage for liquid supply to the ejection port,
the liquid ejection passage has corners each having a curvature radius R 4 , and
the curvature radii R 2 and R 4 satisfy R 4 ≥R 2 .
4. The liquid ejection head according to claim 1 , wherein
the second substrate has an ejection port,
the opening of the second substrate and the first substrate define a space that serves as a common liquid chamber,
the third substrate and the opening of the first substrate define a space that serves as a passage, and
the structure is an energy generating element configured to generate energy that causes liquid to be ejected through the ejection port.
5. The liquid ejection head according to claim 4 , wherein
the third substrate further has an opening connected to the passage,
the opening of the third substrate has corners each having a curvature radius R 5 , and
the curvature radii R 1 , R 2 , and R 5 satisfy R 1 <R 2 <R 5 .
6. The liquid ejection head according to claim 4 , wherein the energy generating element is an electrothermal transducing element.
7. The liquid ejection head according to claim 1 , wherein R 1 <12 μm and R 2 >20 μm.
8. The liquid ejection head according to claim 1 , wherein the structure is a piezoelectric element configured to generate pressure for liquid ejection.
9. A liquid ejection head comprising:
a first substrate having a first surface and a second surface opposite the first surface, the first surface having a structure;
a second substrate having a second surface facing the first surface of the first substrate; and
a third substrate having a first surface facing the second surface of the first substrate,
the first substrate and the second substrate being joined together by an adhesive located between the first surface of the first substrate and the second surface of the second substrate,
the first substrate and the third substrate being joined together by the adhesive located between the second surface of the first substrate and the first surface of the third substrate,
the second surface of the first substrate having an opening that is located in a region on a rear side of the structure and that has corners each having a curvature radius R 2 ,
the second surface of the second substrate having an opening that is located in a region facing the structure and that has corners each having a curvature radius R 1 ,
the curvature radii R 1 and R 2 satisfying R 1 <R 2 ,
wherein R 1 <12 μm and R 2 >20 μm.
10. The liquid ejection head according to claim 9 , wherein the opening at the second surface of the first substrate and the third substrate define a space that serves as a pressure chamber.
11. The liquid ejection head according to claim 9 , wherein
the second substrate further has an opening that extends through the second substrate and that has corners each having a curvature radius R 3 , and
the curvature radii R 1 , R 2 , and R 3 satisfy R 1 <R 3 <R 2 .
12. The liquid ejection head according to claim 9 , wherein
the third substrate further has an ejection port for liquid ejection and a liquid ejection passage for liquid supply to the ejection port,
the liquid ejection passage has corners each having a curvature radius R 4 , and
the curvature radii R 2 and R 4 satisfy R 4 ≥R 2 .
13. The liquid ejection head according to claim 9 , wherein
the second substrate has an ejection port,
the opening of the second substrate and the first substrate define a space that serves as a common liquid chamber,
the third substrate and the opening of the first substrate define a space that serves as a passage, and
the structure is an energy generating element configured to generate energy that causes liquid to be ejected through the ejection port.
14. The liquid ejection head according to claim 13 , wherein
the third substrate further has an opening connected to the passage,
the opening of the third substrate has corners each having a curvature radius R 5 , and
the curvature radii R 1 , R 2 , and R 5 satisfy R 1 <R 2 <R 5 .
15. The liquid ejection head according to claim 13 , wherein the energy generating element is an electrothermal transducing element.
16. The liquid ejection head according to claim 9 , wherein the structure is a piezoelectric element configured to generate pressure for liquid ejection.