Granted Patent B2

US 12,230,625 · App. 18/591,089 · Granted Feb 18, 2025

Inventors: Hakchul Jung (Seoul, KR); Ingyum Kim (Bucheon-si, KR); Giyoung Yang (Seoul, KR); Jaewoo Seo (Seoul, KR)

Assignee: SAMSUNG ELECTRONICS CO., LTD.

H01L27/0207H01L29/0665H01L29/42392H01L29/78696

Abstract

Claims (58)

1. An integrated circuit comprising:

a standard cell comprising a first active region extending in a first direction and having a first width; and

a filler cell comprising a second active region of a same type as that of the first active region and being adjacent to the standard cell in the first direction, the second active region extending in the first direction and having a second width which is greater than the first width,

wherein the standard cell further comprises a first tapering portion of the same type as that of the first active region, the first tapering portion being arranged between the first active region and the second active region and comprising a first contact surface contacting the first active region in the first direction, a second contact surface contacting the second active region in the first direction, and an inclination surface connecting the first contact surface to the second contact surface and having an inclination.

2. The integrated circuit of claim 1 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first direction, and having the second width,

wherein the standard cell further comprises:

a fourth active region of a same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the first width; and

a second tapering portion of the same type as that of the third active region, the second tapering portion being arranged between the third active region and the fourth active region and comprising a first surface contacting the fourth active region in the first direction, a second surface contacting the third active region in the first direction, and a third surface connecting the first surface to the second surface and having an inclination, and

wherein a distance between the first tapering portion and the second tapering portion decreases toward the filler cell.

3. The integrated circuit of claim 1 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first active region, and having a third width which is less than the second width,

wherein the standard cell further comprises a fourth active region of a same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the third width, and

wherein a distance between the fourth active region and the first tapering portion decreases toward the filler cell.

4. The integrated circuit of claim 3 , wherein the third width is the same as the first width.

5. The integrated circuit of claim 1 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first active region, and having the second width,

wherein the standard cell further comprises:

a fourth active region of a same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the first width; and

a second tapering portion of the same type as that of the third active region, the second tapering portion being arranged between the third active region and the fourth active region and comprising a first surface contacting the fourth active region in the first direction, a second surface contacting the third active region in the first direction, and a third surface connecting the first surface to the second surface and having an inclination, and

wherein a distance between the first tapering portion and the second tapering portion is constant.

6. The integrated circuit of claim 1 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first active region, and having a third width which is less than the second width,

wherein the standard cell further comprises a fourth active region of a same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the third width, and

wherein a distance between the fourth active region and the first tapering portion is constant.

7. The integrated circuit of claim 6 , wherein the third width is the same as the first width.

8. The integrated circuit of claim 1 , wherein the inclination surface comprises a straight line or a curved line.

9. The integrated circuit of claim 1 , wherein the filler cell further comprises a contact connected to the second active region.

10. The integrated circuit of claim 1 , wherein the standard cell further comprises a gate-all-around transistor formed in the first active region.

11. An integrated circuit comprising:

a standard cell comprising a first active region extending in a first direction and having a first width; and

a filler cell comprising a second active region of a same type as that of the first active region and being adjacent to the standard cell in the first direction, the second active region extending in the first direction and having a second width which is less than the first width,

wherein the standard cell further comprises a first reverse tapering portion of the same type as that of the first active region, the first reverse tapering portion being arranged between the first active region and the second active region and comprising a first contact surface contacting the first active region in the first direction, a second contact surface contacting the second active region in the first direction, and an inclination surface connecting the first contact surface to the second contact surface and having an inclination.

12. The integrated circuit of claim 11 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first direction, and having the second width,

wherein the standard cell further comprises:

a fourth active region of the same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the first width; and

a second reverse tapering portion of the same type as that of the third active region, the second reverse tapering portion being arranged between the third active region and the fourth active region and comprising a first surface contacting the fourth active region in the first direction, a second surface contacting the third active region in the first direction, and a third surface connecting the first surface to the second surface and having an inclination, and

wherein a distance between the first reverse tapering portion and the second reverse tapering portion increases toward the filler cell.

13. The integrated circuit of claim 11 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first active region, and having a third width which is less than the first width,

wherein the standard cell further comprises a fourth active region of a same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the third width, and

wherein a distance between the fourth active region and the first reverse tapering portion increases toward the filler cell.

14. The integrated circuit of claim 13 , wherein the third width is the same as the second width.

15. The integrated circuit of claim 11 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first direction, and having the second width,

wherein the standard cell further comprises:

a fourth active region of a same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the first width; and

a second reverse tapering portion of the same type as that of the third active region, the second reverse tapering portion being arranged between the third active region and the fourth active region and comprising a first surface contacting the fourth active region in the first direction, a second surface contacting the third active region in the first direction, and a third surface connecting the first surface to the second surface and having an inclination, and

wherein a distance between the first reverse tapering portion and the second reverse tapering portion is constant.

16. The integrated circuit of claim 11 ,

wherein the filler cell further comprises a third active region of a different type from that of the second active region, the third active region being spaced apart from the second active region in a second direction perpendicular to the first direction, extending in the first active region, and having a third width which is less than the first width,

wherein the standard cell further comprises a fourth active region of the same type as that of the third active region, the fourth active region being spaced apart from the first active region in the second direction, extending in the first direction, and having the third width, and

wherein a distance between the fourth active region and the first reverse tapering portion is constant.

17. The integrated circuit of claim 16 , wherein the third width is the same as the second width.

18. The integrated circuit of claim 11 , wherein the inclination surface comprises a straight line or a curved line.

19. The integrated circuit of claim 11 , wherein the filler cell further comprises a contact formed on the second active region.

20. The integrated circuit of claim 11 , wherein the standard cell further comprises a gate-all-around transistor formed in the first active region.

Priority Claims (1)

Continuity (2)

References Cited (15)