Sensor and distance measurement apparatus having an avalanche photodiode and on-chip lens
A sensor including: a semiconductor substrate ( 41 ) having a first surface (S 1 ) and a second surface (S 2 ) opposed to each other, and including an avalanche photodiode; an on-chip lens ( 71 ) provided on side of the first surface (S 1 ) of the semiconductor substrate ( 41 ); a first reflective member ( 73 ) provided on the on-chip lens ( 71 ); and a wiring layer ( 42 ) provided on side of the second surface (S 2 ) of the semiconductor substrate ( 41 ), and including a second reflective member ( 104 ).
1. A sensor chip, comprising:
a pixel array section comprising a plurality of pixels, wherein
the plurality of pixels includes:
a first set of pixels, and
a second set of pixels different from the first set of pixels, wherein the second set of pixels is outside a middle part of the pixel array section;
each pixel of the plurality of pixels includes:
a semiconductor substrate that includes:
a first surface;
a second surface, wherein the first surface is opposite to the second surface; and
an avalanche photodiode;
an on-chip lens on a side of the first surface of the semiconductor substrate;
a first reflective member that is on a front surface of the on-chip lens at a position which is opposite to the avalanche photodiode, wherein the position of the first reflective member on the on-chip lens is based on an image height of one of the first set of pixels or the second set of pixels in the pixel array section, wherein the first reflective member includes a main portion and a small portion separated from each other; and
a wiring layer on a side of the second surface of the semiconductor substrate, wherein the wiring layer includes a second reflective member.
2. The sensor chip according to claim 1 , wherein the second reflective member is configured to reflect a light towards the first reflective member, and the first reflective member is configured to reflect the reflected light towards the avalanche photodiode.
3. The sensor chip according to claim 1 , wherein the avalanche photodiode is configured to receive a light of a wavelength in a near infrared region and an infrared region.
4. The sensor chip according to claim 1 , wherein the first reflective member is on the on-chip lens.
5. The sensor chip according to claim 1 , wherein the position of the first reflective member deviates from a middle part of the on-chip lens.
6. The sensor chip according to claim 1 , wherein the first reflective member is at a middle part of the on-chip lens.
7. The sensor chip according to claim 1 , further comprising an antireflection member stacked on the first reflective member on a side of the first reflective member, wherein the side of the first reflective member is opposite to the on-chip lens.
8. The sensor chip according to claim 7 , wherein the antireflection member includes one of a carbon black film or a silicon oxide film.
9. The sensor chip according to claim 1 , wherein
the first reflective member is at a middle part of the on-chip lens for the first set of pixels, and
the first reflective member deviates from the middle part of the on-chip lens for the second set of pixels.
10. The sensor chip according to claim 1 , wherein an inverted pyramid array structure is on a front surface of the semiconductor substrate.
11. The sensor chip according to claim 1 , wherein
the first reflective member occupies a specific area that is 25% or less of an area of each pixel of the plurality of pixels.
12. The sensor chip according to claim 1 , wherein the first reflective member includes one of tungsten, silver, aluminum, gold, or copper.
13. The sensor chip according to claim 1 , wherein
the plurality of pixels includes a first pixel and a second pixel,
the first pixel includes the avalanche photodiode configured to receive a light of a wavelength in a near infrared region and an infrared region, and
the second pixel includes a photodiode configured to receive a light of a wavelength in a visible region.
14. The sensor chip according to claim 13 , wherein the first pixel includes the first reflective member.
15. The sensor chip according to claim 13 , further comprising an optical functional film stacked on the first reflective member, wherein
each of the optical functional film and the first reflective member are in the first pixel and the second pixel, and
the optical functional film and the first reflective member are configured to transmit the light of the wavelength in the visible region and reflect the light of the wavelength in the near infrared region and the infrared region.
16. The sensor chip according to claim 1 , wherein the first reflective member includes a plurality of portions.
17. The sensor chip according to claim 1 , wherein the sensor chip further includes a pixel separation part that is configured by a groove that penetrates the semiconductor substrate from the first surface to the second surface.
18. A distance measurement apparatus, comprising:
a sensor chip that includes a pixel array section, wherein the pixel array section comprises:
a plurality of pixels that includes:
a first set of pixels, and
a second set of pixels different from the first set of pixels, wherein the second set of pixels is outside a middle part of the pixel array section;
each pixel of the plurality of pixels includes:
a semiconductor substrate that includes:
a first surface;
a second surface that is opposite to the first surface; and
an avalanche photodiode;
an on-chip lens on a side of the first surface of the semiconductor substrate;
a first reflective member that is on a front surface of the on-chip lens at a position which is opposite to the avalanche photodiode, wherein the position of the first reflective member on the on-chip lens is based on an image height of one of the first set of pixels or the second set of pixels in the pixel array section, wherein the first reflective member includes a main portion and a small portion separated from each other; and
a wiring layer on a side of the second surface of the semiconductor substrate, wherein the wiring layer includes a second reflective member.