Bottom and middle edge rings
A bottom ring is configured to support a moveable edge ring. The edge ring is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, and a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring. Each of the guide channels includes a first region having a smaller diameter than the guide channel, and the guide channels are configured to receive respective lift pins for raising and lowering the edge ring.
1. A bottom ring configured to support a moveable edge ring, wherein the edge ring is configured to be raised and lowered relative to a substrate support, the bottom ring comprising:
an upper surface, wherein the upper surface includes a step upward such that the upper surface has at least two different heights, and wherein the step upward is substantially vertical;
an annular inner diameter;
an annular outer diameter;
a lower surface that includes a step downward towards the annular outer diameter of the bottom ring such that the lower surface has at least two different heights; and
a plurality of guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring, wherein the plurality of guide channels is positioned radially inward from the step downward, the plurality of guide channels is positioned nearer to the step downward than to the annular inner diameter, each of the guide channels includes a first region having a smaller diameter than a remainder of the guide channel, the first region is positioned closer to the upper surface than the lower surface of the bottom ring, and the guide channels are configured to receive respective lift pins for raising and lowering the edge ring.
2. The bottom ring of claim 1 , wherein a diameter of the guide channel is between 0.063″ and 0.067″.
3. The bottom ring of claim 1 , wherein an inner diameter of the step upward in the upper surface is at least 13.0″.
4. The bottom ring of claim 1 , wherein the upper surface includes at least two changes in direction.