Display device and manufacturing method thereof
The purpose of the invention is to form a stable oxide semiconductor TFT in a display device. The concrete structure is: A display device having a TFT substrate that includes a TFT having an oxide semiconductor layer comprising: the oxide semiconductor layer is formed on a first insulating film that is formed by a silicon oxide layer, the oxide semiconductor layer and an aluminum oxide film are directly formed on the first insulating film. The first insulating film becomes oxygen rich when the aluminum oxide film is formed on the first insulating film by sputtering. Oxygens in the first insulating film is effectively confined in the first insulating film, eventually, the oxygens diffuse to the oxide semiconductor for a stable operation of the oxide semiconductor TFT.
1. A display device comprising:
a substrate;
a first transistor including an oxide semiconductor layer above the substrate;
a first insulating film under the oxide semiconductor layer; and
an aluminum oxide film above the substrate,
wherein
the aluminum oxide film is on and in contact with the first insulating film,
an end part of the oxide semiconductor layer overlies the aluminum oxide film,
a first gate electrode faces the oxide semiconductor layer,
the first insulating film is located between the oxide semiconductor layer and the first gate electrode,
the aluminum oxide film and the oxide semiconductor layer are stacked in a portion apart from the first gate electrode in a plan view,
the aluminum oxide film is between the oxide semiconductor layer and the substrate,
a drain metal that contacts a first end part of the oxide semiconductor layer and does not contact the aluminum oxide film; and
a source metal that contacts a second end part of the oxide semiconductor layer and does not contact the aluminum oxide film, the second end part being at an opposite side of the first end part.
2. The display device according to claim 1 , wherein
the aluminum oxide film does not overlap the first gate electrode in the plan view.
3. The display device according to claim 1 , further comprising:
a second insulating film located on the oxide semiconductor layer; and
a second gate electrode located on the second insulating film.
4. The display device according to claim 3 , wherein
the second insulating film is located only on a channel of the oxide semiconductor layer.
5. A display device comprising:
a substrate;
a first transistor including an oxide semiconductor layer above the substrate;
a first insulating film under the oxide semiconductor layer; and
an aluminum oxide film above the substrate,
wherein
the aluminum oxide film is on and in contact with the first insulating film,
an end part of the oxide semiconductor layer overlies the aluminum oxide film,
a light shielding film faces the oxide semiconductor layer and is located under the oxide semiconductor layer and the first insulating film,
the aluminum oxide film and the oxide semiconductor layer are stacked in a portion apart from the light shielding film in a plan view,
the aluminum oxide film is between the oxide semiconductor layer and the substrate,
a drain metal that contacts a first end part of the oxide semiconductor layer and does not contact the aluminum oxide film; and
a source metal that contacts a second end part of the oxide semiconductor layer and does not contact the aluminum oxide film, the second end part being at an opposite side of the first end part.
6. The display device according to claim 5 , wherein
the aluminum oxide film does not overlap the light shielding film in the plan view.
7. The display device according to claim 5 , further comprising:
a second insulating film located on the oxide semiconductor layer, and
a second gate electrode located on the second insulating film.
8. The display device according to claim 7 , wherein
the second insulating film is located only on a channel of the oxide semiconductor layer.