Semiconductor device
A display device including a substrate having thin film transistors (TFT) comprising: the TFT including an oxide semiconductor film, a gate electrode and an insulating film formed between the oxide semiconductor film and the gate electrode, wherein a first aluminum oxide film and a second aluminum oxide film, which is formed on the first aluminum oxide film, are formed between the insulating film and the gate electrode, an oxygen concentration in the first aluminum oxide film is bigger than an oxygen concentration in the second aluminum oxide film.
1. A semiconductor device comprising:
an oxide semiconductor film,
a gate electrode, and
a gate insulating film arranged between the oxide semiconductor film and the gate electrode,
wherein an aluminum oxide film is arranged between the gate insulating film and the gate electrode,
the aluminum oxide film has a first aluminum oxide film and a second aluminum oxide film,
the gate insulating film is made of silicon oxide,
a first oxygen concentration in the first aluminum oxide film is bigger than a second oxygen concentration in the second aluminum oxide film.
2. The semiconductor device according to claim 1 ,
wherein a thickness of the second aluminum oxide film is bigger than a thickness of the first aluminum oxide film.
3. The semiconductor device according to claim 2 ,
wherein a thickness of the first aluminum oxide film is 2-5 nm.
4. The semiconductor device according to claim 2 ,
wherein a thickness of the second aluminum oxide film is 5-10 nm.
5. The semiconductor device according to claim 1 ,
wherein the gate insulating film is formed between the gate electrode and the oxide semiconductor film, and
the gate insulating film is not formed on a drain or a source of the oxide semiconductor film.
6. The semiconductor device according to claim 5 ,
the aluminum oxide film and the gate electrode are formed by patterning after stacking to cover the oxide semiconductor.