Semiconductor device structure and method for forming the same
View Patent ↗A semiconductor device structure is provided. The semiconductor device structure includes first nanostructures and second nanostructures formed over a substrate, and a first gate structure formed over the first nanostructures. The semiconductor device structure includes a second gate structure formed over the second nanostructures, and the second gate structure includes a gate dielectric layer, a first type work function layer and a filling layer. The semiconductor device structure includes a first isolation layer between the first gate structure and the second gate structure, and the first isolation layer includes a first sidewall surface, and the first sidewall surface is in direct contact with a first interface between the gate dielectric layer and the first type work function layer and a second interface between the work function layer and the filling layer.
1. A semiconductor device structure, comprising:
first nanostructures and second nanostructures formed over a substrate;
a first gate structure formed over the first nanostructures;
a second gate structure formed over the second nanostructures, wherein the second gate structure comprises a gate dielectric layer, a first type work function layer and a filling layer; and
a first isolation layer between the first gate structure and the second gate structure, wherein the first isolation layer comprises a first sidewall surface, and the first sidewall surface is in direct contact with a first interface between the gate dielectric layer and the first type work function layer and a second interface between the work function layer and the filling layer.
2. The semiconductor device structure as claimed in claim 1 , wherein the first isolation layer further comprises a second sidewall surface opposite to the first sidewall surface, and a first slope of the first sidewall surface is different from a second slope of the second sidewall surface.
3. The semiconductor device structure as claimed in claim 1 , wherein the second gate structure further comprises a second type work function layer, and the second type work function layer is formed to surround each of the second nanostructures.
4. The semiconductor device structure as claimed in claim 1 , wherein the first isolation layer has a step-shaped sidewall when seen from a cross-sectional view.
5. The semiconductor device structure as claimed in claim 1 , wherein the first isolation layer has a recessed top surface.
6. The semiconductor device structure as claimed in claim 5 , further comprising:
a second isolation layer formed on the recessed top surface of the first isolation layer.
7. The semiconductor device structure as claimed in claim 1 , wherein the second gate structure further comprises a block layer between the first type work function layer and the filling layer, and the first isolation layer is in direct contact with the block layer.
8. The semiconductor device structure as claimed in claim 1 , further comprising:
an isolation structure formed over the substrate, wherein the first isolation layer is directly on the isolation structure.
9. The semiconductor device structure as claimed in claim 1 , wherein a sidewall surface of the gate dielectric layer extends beyond a sidewall surface of the filling layer.
10. A semiconductor device structure, comprising:
a first stacked nanostructure and a second stacked nanostructure formed over a substrate;
a first gate structure formed over the first stacked nanostructure, wherein the first gate structure comprises a first portion of a filling layer;
a second gate structure formed over the second stacked nanostructure, wherein the second gate structure comprises a second portion of the filling layer; and
a first isolation layer between the first gate structure and the second gate structure, wherein a portion of the first isolation layer is directly below the second portion of the filling layer.
11. The semiconductor device structure as claimed in claim 10 , wherein another portion of the first isolation layer is directly below the first portion of the filling layer.
12. The semiconductor device structure as claimed in claim 10 , wherein the first gate structure further comprises a gate dielectric layer, and a sidewall surface of the gate dielectric layer extends beyond a sidewall surface of the first portion of the filling layer.
13. The semiconductor device structure as claimed in claim 12 , wherein the first gate structure further comprises a work function layer, and the sidewall surface of the gate dielectric layer extends beyond a sidewall surface of work function layer.
14. The semiconductor device structure as claimed in claim 13 , wherein the first gate structure further comprises a barrier layer, and the sidewall surface of the gate dielectric layer extends beyond a sidewall surface of the barrier layer.
15. The semiconductor device structure as claimed in claim 10 , wherein the second gate structure comprises a layer which surrounds the first stacked nanostructure, and the layer is not formed in the first gate structure.
16. The semiconductor device structure as claimed in claim 10 , further comprising:
a second isolation layer formed on the first isolation layer, wherein the first isolation layer has recessed portion, and the second isolation layer is formed in the recessed portion.
17. A method for forming a semiconductor device structure, comprising:
forming a first stacked nanostructure and a second stacked nanostructure;
forming a gate dielectric layer, a work function layer and a filling layer over the first stacked nanostructure and the second stacked nanostructure;
removing a portion of the filling layer to form an opening, wherein a portion of the work function layer, and a portion of the gate dielectric layer are exposed by the opening;
removing an exposed portion of the work function layer;
removing an exposed portion of the gate dielectric layer; and
forming a first isolation layer in the opening, wherein the first isolation layer is between the first stacked nanostructure and the second stacked nanostructure.
18. The method for forming the semiconductor device structure as claimed in claim 17 , wherein the filling layer with a first sidewall surface and a second sidewall surface exposed by the opening, and the first sidewall surface and the second sidewall surface are asymmetric in relating to a middle portion of the opening.
19. The method for forming the semiconductor device structure as claimed in claim 17 , wherein the work function layer is formed over the second stacked nanostructure, but not formed over the first stacked nanostructure.
20. The method for forming the semiconductor device structure as claimed in claim 17 , further comprising:
forming a second isolation layer on the first isolation layer, wherein the first isolation layer has a recessed top portion, and the second isolation layer is formed in the recessed top portion of the first isolation layer.