Test apparatus
View Patent ↗A test apparatus tests a wafer under test on which devices under test each including magnetoresistive memory or a magnetic sensor are formed. In a test process, the wafer under test is mounted on a stage. In the test process, a magnetic field application apparatus applies a magnetic field B EX to the wafer under test. A test probe card is used in the test process. Multiple magnetization detection units are formed on a diagnostic wafer. In a diagnostic process of the test apparatus, the diagnostic wafer is mounted on the stage instead of the wafer under test. Each magnetization detection unit is capable of measuring a magnetic field B EX generated by the magnetic field application apparatus. In the diagnostic process, the diagnostic probe card is used instead of the test probe card.
1. A test method for testing, by a test apparatus, a wafer under test on which devices under test each comprising magnetoresistive memory or a magnetic sensor are formed, the method comprising:
mounting the wafer under test on a stage in a test process;
applying, by a magnetic field application apparatus, a magnetic field to the wafer under test in the test process;
making, by a test probe card, probe contact with the wafer under test in the test process;
removing the wafer under test;
mounting a diagnostic wafer on the stage in a diagnostic process of the test apparatus after the removing the wafer under test, wherein a plurality of magnetization detection units are formed on the diagnostic wafer, and the diagnostic wafer is structured to measure a magnetic field generated by the magnetic field application apparatus by means of each magnetization detection unit in the diagnostic process;
removing the test probe card; and
using a diagnostic probe card in the diagnostic process after the removing the test probe card, and making probe contact with the diagnostic wafer.
2. The test method according to claim 1 , wherein the test apparatus further comprises a connection unit arranged between the test probe card or the diagnostic probe card and a test head of the test apparatus,
wherein the magnetic field application apparatus is provided to the connection unit.
3. The test method according to claim 1 , wherein the plurality of magnetization detection units each comprise:
a magnetic sensor; and
an amplifier structured to amplify an electrical signal output from the magnetic sensor.
4. The test method according to claim 2 , wherein the plurality of magnetization detection units each comprise:
a magnetic sensor; and
an amplifier structured to amplify an electrical signal output from the magnetic sensor.
5. The test method according to claim 1 , wherein the plurality of magnetization detection units each comprise a magnetic sensor,
wherein the diagnostic probe card comprises a plurality of amplifiers that correspond to the plurality of magnetization detection units,
and wherein each amplifier is structured to amplify an electrical signal output from the corresponding magnetic sensor.
6. The test method according to claim 2 , wherein the plurality of magnetization detection units each comprise a magnetic sensor,
wherein the diagnostic probe card comprises a plurality of amplifiers that correspond to the plurality of magnetization detection units,
and wherein each amplifier is structured to amplify an electrical signal output from the corresponding magnetic sensor.