Substrate flipping in vacuum for dual sided PVD sputtering
A module of a processing system for flipping a substrate in vacuum includes a clamp assembly for securing the substrate, a first motor assembly coupled to the clamp assembly for rotating the clamp assembly, and a second motor assembly coupled to the first motor assembly for raising and lowering the first motor assembly and the clamp assembly.
1. A module of a processing system for flipping a substrate in vacuum, the module comprising:
a clamp assembly for securing a substrate placed in a first plane;
a first motor assembly coupled to the clamp assembly for rotating the clamp assembly around a first direction that is parallel to the first plane;
a first plate;
a second plate parallel to the first plate, the second plate movably coupled to the first plate in a second direction that is perpendicular to the first plane by a pair of spring-loaded connectors, the pair of spring-loaded connectors biasing the first and second plates towards each other to a clamped position, wherein each of the pair of spring-loaded connectors includes a pin disposed through the first and second plates and a pair of springs disposed at opposite ends of the pin; and
a slide coupled to the clamp assembly on a side opposite the first motor assembly in the first direction, wherein the slide comprises a bearing support that supports:
rotation of the clamp assembly by the first motor assembly around the first direction through a rotatable bearing.
2. The module of claim 1 , further comprising:
a second motor assembly for raising and lowering the first motor assembly and the clamp assembly in the second direction that is perpendicular to the first plane.
3. The module of claim 1 , wherein the clamp assembly, the first motor assembly, and the slide are each disposed in vacuum.
4. The module of claim 1 , wherein the first and second plates each comprise a plurality of L-shaped pieces collectively forming a ledge for supporting an edge of the substrate, wherein:
each of the plurality of L-shaped pieces extends from the respective plate in the second direction,
in the clamped position, each of the plurality of L-shaped pieces is disposed through a corresponding opening in the opposite plate, and
in an open position, each of the plurality of L-shaped pieces is disposed in a space between the first and second plates for loading the substrate onto the ledge of one of the first and second plates.
5. The module of claim 4 , wherein the first and second plates each comprise an edge without L-shaped pieces to enable loading of the substrate.
6. The module of claim 4 , wherein the module further comprises a pair of lift pins configured to contact one of the first or second plates for moving the clamp assembly to an open position.
7. A processing system, comprising:
a deposition chamber;
a transfer chamber coupled to the deposition chamber; and
a flipping chamber coupled to the transfer chamber, the flipping chamber comprising a module for flipping a substrate in vacuum, the module comprising:
a clamp assembly for securing a substrate placed in a first plane;
a first motor assembly coupled to the clamp assembly for rotating the clamp assembly around a first direction that is parallel to the first plane;
a first plate;
a second plate parallel to the first plate, the second plate movably coupled to the first plate in a second direction that is perpendicular to the first plane by a pair of spring-loaded connectors, the pair of spring-loaded connectors biasing the first and second plates towards each other to a clamped position, wherein each of the pair of spring-loaded connectors includes a pin disposed through the first and second plates and a pair of springs disposed at opposite ends of the pin; and
a slide coupled to the clamp assembly on a side opposite the first motor assembly in the first direction, wherein the slide comprises a bearing support that supports:
rotation of the clamp assembly by the first motor assembly around the first direction through a rotatable bearing.
8. The processing system of claim 7 ,
a second motor assembly for raising and lowering the first motor assembly and the clamp assembly in the second direction.
9. The processing system of claim 7 , wherein the deposition chamber comprises a physical vapor deposition (PVD) chamber.
10. The processing system of claim 7 , further comprising a load lock chamber coupled to the transfer chamber.
11. The processing system of claim 10 , wherein each of the deposition chamber, the transfer chamber, the flipping chamber and the load lock chamber are at vacuum.
12. The processing system of claim 10 , further comprising a pre-clean chamber coupled to the transfer chamber.
13. The processing system of claim 7 , wherein the flipping chamber comprises a door for unloading the substrate from the processing system, the processing system further comprising a load lock chamber for loading another substrate into the processing system.
14. A method of flipping a substrate, comprising:
receiving the substrate in a flipping chamber, the flipping chamber comprising a module for flipping the substrate, the module comprising:
a clamp assembly for securing a substrate placed in a first plane;
a first motor assembly coupled to the clamp assembly for rotating the clamp assembly around a first direction that is parallel to the first plane;
a first plate;
a second plate parallel to the first plate, the second plate movably coupled to the first plate in a second direction that is perpendicular to the first plane by a pair of spring-loaded connectors, the pair of spring-loaded connectors biasing the first and second plates towards each other to a clamped position, wherein each of the pair of spring-loaded connectors includes a pin disposed through the first and second plates and a pair of springs disposed at opposite ends of the pin; and
a slide coupled to the clamp assembly on a side opposite the first motor assembly in the first direction, wherein the slide comprises a bearing support that supports:
rotation of the clamp assembly by the first motor assembly around the first direction through a rotatable bearing; and
flipping the substrate in vacuum.
15. The method of claim 14 , wherein the module further comprises:
a second motor assembly for raising and lowering the first motor assembly and the clamp assembly in the second direction.
16. The method of claim 14 , further comprising:
positioning the clamp assembly in a first position;
with the clamp assembly opened, receiving the substrate on the first plate, a front side of the substrate facing up; and
rotating the clamp assembly by 180° using the first motor assembly, wherein the substrate is disposed on the second plate with the front side facing down.