Microfluidic dispenser device for delivering inhalable substances
A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.
1. A nebulizer, comprising:
a substrate including a surface;
a heater at the surface of the substrate;
an insulating layer on the surface of the substrate and overlapping the heater at the surface of the substrate;
a chamber layer on the insulating layer, the chamber layer including:
a chamber that is aligned with and overlaps the heater, the chamber including:
a central region aligned with the heater;
a plurality of peripheral regions that are around the central region,
wherein the plurality of peripheral regions are a plurality of niches that extend from the central region;
a nozzle plate on the chamber layer, the nozzle plate including:
a plurality of nozzles that extend through the nozzle plate to the chamber layer, each one of the plurality of nozzles overlaps a corresponding peripheral region of the plurality of peripheral regions.
2. The nebulizer of claim 1 , wherein the chamber has a rectangular shape.
3. The nebulizer of claim 1 , wherein the chamber has a triangular shape.
4. The nebulizer of claim 1 , wherein the chamber has a star shape.
5. The nebulizer of claim 1 , wherein the plurality of niches are at corners of the central region of the chamber.
6. The nebulizer of claim 1 , wherein the heater is one of a plurality of heaters.
7. The nebulizer of claim 1 , wherein the heater chamber is one of a plurality of heater chambers.
8. The nebulizer of claim 1 , wherein the heater is fully overlapped by the chamber.
9. The nebulizer of claim 1 , wherein the heater is within the central region of the chamber.
10. A microfluidic cartridge, comprising:
a tank;
a nebulizer in fluid communication with the tank, the nebulizer including:
a substrate;
a heater on the substrate;
an insulating layer on the substrate and overlapping the heater-;
a chamber layer on the insulating layer, the chamber layer including:
a chamber having a triangular shape that overlaps the heater, the chamber including:
a central region aligned with the heater;
a plurality of peripheral regions that are around the central region;
a nozzle plate on the chamber layer, the nozzle plate including:
a plurality of nozzles that overlap the plurality of peripheral regions.
11. The microfluidic cartridge of claim 10 , further comprising a lid on the tank, the lid including a channel extending through the lid and in fluidic communication with the nebulizer.
12. The microfluidic cartridge of claim 10 , wherein the nebulizer one of a plurality of nebulizers in fluid communication with the tank.
13. The microfluidic cartridge of claim 12 , wherein:
the tank further includes a plurality of walls and a tank cavity, the plurality of walls separate the tank cavity into a plurality of sub-tank cavities; and
each nebulizer of the plurality of nebulizers is in fluid communication with a corresponding a respective sub-tank cavity of the plurality of sub-tank cavities.
14. A microfluidic dispenser device, comprising:
a casing;
a driving circuit within the casing;
a microfluidic cartridge within the casing, the microfluidic cartridge including:
a tank including a tank cavity;
a lid on the tank, the lid including a channel that extends through the lid and is in fluid communication with the tank cavity;
a nebulizer on the lid, the nebulizer in fluid communication with the tank cavity through the channel, the nebulizer including:
a substrate including a surface;
a heater at the surface of the substrate;
an insulating layer on the surface of the substrate and overlapping the heater at the surface of the substrate;
a chamber layer on the insulating layer, the chamber layer including a chamber having a triangular shape that is aligned with and overlaps the heater;
a nozzle plate on the chamber layer, the nozzle plate including a plurality of nozzles that extend through the nozzle plate to the chamber in the chamber layer.
15. The microfluidic dispenser device of claim 14 , wherein the chamber includes:
a central region aligned with the heater; and
a plurality of peripheral regions that are present around the central region.
16. The microfluidic dispenser device of claim 15 , wherein each one of the plurality of nozzles overlaps a corresponding peripheral region of the plurality of peripheral regions.
17. The microfluidic dispenser device of claim 15 , wherein the plurality of peripheral regions are corners of the chamber.
18. The microfluidic dispenser device of claim 15 , wherein the plurality of peripheral regions are niches at corners of the central region.