Micro-nano device, manufacturing method, and display device
View Patent ↗The present disclosure relates to the field of micro-nano devices, and discloses a micro-nano device, a manufacturing method, and a display device. The micro-nano device includes a micro-nano structural cell; wherein the micro-nano structural cell includes a substrate provided with a light incident surface and a light emergent surface which are oppositely disposed; a first electrode layer, a second electrode layer, a tunable dielectric layer and an absorbing layer.
1. A display device, comprising: a display panel, and a micro-nano device located on a side of a light emergent surface of the display panel, wherein the micro-nano device comprises: a micro-nano structural cell; wherein
the display panel comprises a plurality of pixel units, wherein the pixel units are in one-to-one correspondence with first electrodes in the micro-nano device, and the pixel units are in one-to-one correspondence with second electrodes in the micro-nano device;
light is emitted from the pixel units to the micro-nano structural cell; and
in response to the light being a one-dimensional beam, a working principle of the micro-nano structural cell is shown by a following formula:
A ref =e −ikz
A obj =e −ikx i sin θ
A=A obj ·A* ref,z=0 =A obj = −ikx i sin θ
Sample=Re( A )=|cos( kx i sin θ)|
wherein A ref is a reference beam; A obj is a target beam; θ is a pitch angle of beam target pointing; z is a height of a z axis; x i is a position in the x-axis direction corresponding to each pixel unit, and i is a positive integer; k=2π/λ, k being a wave vector in the air; and sample is a sample function; and
the micro-nano structural cell comprises:
a substrate provided with a light incident surface and a light emergent surface which are oppositely disposed;
a first electrode layer located on a side of the light emergent surface of the substrate, wherein the first electrode layer comprises the first electrodes;
a second electrode layer located on a side, facing away from the substrate, of the first electrode layer, wherein the second electrode layer comprises the second electrodes disposed in one-to-one correspondence with the first electrodes, the overlapping regions the first electrodes with the second electrodes on the display panel correspondingly form a plurality of light control regions, and the pixel units are located within the light control regions;
a tunable dielectric layer located between the first electrode layer and the second electrode layer; wherein an absorption resonance frequency of the tunable dielectric layer is changed under a drive of an electric field between the first electrodes and the second electrodes to change a transmission intensity of light in the micro-nano structural cell; and
an absorbing layer located on aside, facing away from the tunable dielectric layer, of the second electrode layer; wherein the absorbing layer selectively absorbs light in different regions within the plurality of light control regions to change a direction of light passing through the micro-nano structural cell.
2. The display device according to claim 1 , wherein the tunable dielectric layer comprises a dielectric elastomer, and a thickness of the dielectric elastomer is changed by changing a voltage value between the first electrodes and the second electrodes.
3. The displayer device according to claim 2 , wherein the first electrode layer and the second electrode layer are both made of indium tin oxide.
4. The display device according to claim 2 , wherein the first electrode layer is a metal layer and the second electrode layer is a metal layer; and
the first electrodes are of a mesh structure and the second electrodes are of a mesh structure.
5. The display device according to claim 1 , wherein a material of the tunable dielectric layer is a phase change material, and a crystalline state of the phase change material is changed by changing a voltage value between the first electrodes and the second electrodes.
6. The display device according to claim 5 , wherein the first electrode layer and the second electrode layer are both made of indium tin oxide.
7. The display device according to claim 5 , wherein the first electrode layer is a metal layer and the second electrode layer is a metal layer; and
the first electrodes are of a mesh structure and the second electrodes are of a mesh structure.
8. The display device according to claim 1 , wherein a material of the tunable dielectric layer is a two-dimensional material, and a carrier concentration of the two-dimensional material is changed by changing a voltage value between the first electrodes and the second electrodes.
9. The display device according to claim 8 , wherein the first electrode layer and the second electrode layer are both made of indium tin oxide.
10. The display device according to claim 1 , wherein a material of the tunable dielectric layer is a liquid crystal material, and a deflection direction of the liquid crystal material is changed by changing a voltage value between the first electrodes and the second electrodes.
11. The display device according to claim 10 , wherein the first electrode layer and the second electrode layer are both made of indium tin oxide.
12. The display device according to claim 1 , wherein the first electrode layer and the second electrode layer are both made of indium tin oxide.
13. The display device according to claim 1 , wherein the first electrode layer is a metal layer and the second electrode layer is a metal layer; and
the first electrodes are of a mesh structure and the second electrodes are of a mesh structure.
14. The display device according to claim 1 , wherein a material of the absorbing layer is a metallic material.
15. The display device according to claim 14 , wherein the metallic material is silver.
16. The display device according to claim 1 , wherein the first electrodes form a first electrode cell, and the second electrodes form a second electrode cell; and
the first electrode cell is arranged in a first direction, the second electrode cell is arranged in a second direction, and the first electrode cell is provided with an overlapping regions with the second electrode cell.
17. The display device according to claim 16 , wherein the first electrode cell and the second electrode cell are orthogonal to each other.