Forming integrated electronic devices for converting and downscaling alternating current
Bonding a full-bridge device and an LLC device in a stack, or forming the full-bridge device and the LLC device on a same substrate, rather than connecting the devices, reduces a chip area associated with a power converter including the full-bridge device and the LLC device. Additionally, the full-bridge device and the LLC device consume less power because parasitic inductance and capacitance are reduced. Additionally, raw materials and production time are conserved that would otherwise have been used to connect the full-bridge device and the LLC device (e.g., via wires).
1. A method, comprising:
forming a first gate over a first substrate for driving a first drain associated with a full-bridge device for converting alternating current to direct current;
forming a second gate over a second substrate for driving a second drain associated with an inductor-inductor-capacitor (LLC) device for reducing a voltage of the direct current;
stacking and bonding the second substrate and the first substrate together to form an integrated device; and
forming a plurality of redistribution layers (RDLs) connected to the first drain, the second drain, and sources associated with the first drain and the second drain.
2. The method of claim 1 , wherein bonding the second substrate and the first substrate together comprises:
using solder structures to connect metallization layers of the first substrate to metallization layers of the second substrate.
3. The method of claim 1 , wherein bonding the second substrate and the first substrate together comprises:
using direct bonding to connect the first substrate to the second substrate,
wherein the first substrate and the second substrate are physically and electronically bonded by a first pad associated with the full-bridge device in contact with a second pad associated with the LLC device.
4. The method of claim 1 , wherein forming the plurality of RDLs comprises:
forming the plurality of RDLs on a single side of the integrated device.
5. The method of claim 1 , wherein forming the plurality of RDLs comprises:
forming the plurality of RDLs on opposing sides of the integrated device.
6. The method of claim 1 , further comprising:
forming a first transformer connected to the first drain associated with the full-bridge device; and
forming a second transformer connected to the second drain associated with the LLC device.
7. The method of claim 1 , further comprising:
forming a first inductor connected to the first drain associated with the full-bridge device; and
forming a second inductor connected to the second drain associated with the LLC device.
8. The method of claim 1 , wherein the first gate is associated with a larger breakdown voltage than the second gate.
9. A method, comprising:
forming a first gate over a first portion of a substrate for driving a first drain associated with a full-bridge device for converting alternating current to direct current;
forming a second gate over a second portion of the substrate for driving a second drain associated with an inductor-inductor-capacitor (LLC) device for reducing a voltage of the direct current;
forming one or more isolation structures to isolate the first gate from the second gate; and
forming a plurality of redistribution layers (RDLs) connected to the first drain, the second drain, and sources associated with the first drain and the second drain.
10. The method of claim 9 , further comprising:
removing the substrate from an integrated device including the full-bridge device and the LLC device; and
attaching the integrated device to a carrier wafer.
11. The method of claim 10 , wherein the plurality of RDLs are formed on a side of the integrated device opposite the carrier wafer.
12. The method of claim 9 , wherein forming the plurality of RDLs comprises:
forming the plurality of RDLs on a single side of an integrated device including the full-bridge device and the LLC device.
13. The method of claim 9 , wherein the one or more isolation structures comprise one or more through-glass vias (TGVs).
14. The method of claim 9 , further comprising:
forming a first transformer connected to the first drain associated with the full-bridge device; and
forming a second transformer connected to the second drain associated with the LLC device.
15. The method of claim 9 , further comprising:
forming a first inductor connected to the first drain associated with the full-bridge device; and
forming a second inductor connected to the second drain associated with the LLC device.
16. The method of claim 9 , wherein the first gate is associated with a larger breakdown voltage than the second gate.
17. A device, comprising:
a dielectric layer;
a first gate in the dielectric layer for driving a first drain associated with a full-bridge device for converting alternating current to direct current;
a second gate in the dielectric layer for driving a second drain associated with an inductor-inductor-capacitor (LLC) device for reducing a voltage of the direct current; and
an insulating structure between the first gate and the second gate.
18. The device of claim 17 , wherein the insulating structure comprises through-glass vias (TGVs) to isolate the first gate from the second gate.
19. The device of claim 17 , wherein the insulating structure comprises a dielectric layer that separates the first gate from the second gate along a vertical direction.
20. The device of claim 17 , further comprising:
a plurality of redistribution layers (RDLs) connected to the first drain, the second drain, and sources associated with the first drain and the second drain.