Image sensor device
An image sensor device includes a semiconductor device, a plurality of photo sensitive regions, a dielectric layer, a grid structure, and a plurality of convex dielectric lenses. The photo sensitive regions are in the semiconductor substrate. The dielectric layer is over a backside surface of the semiconductor substrate. The grid structure is over a backside surface of the dielectric layer. The grid structure includes a plurality of grid lines. Each of the grid lines comprises a lower portion and an upper portion forming an interface with the lower portion. The convex dielectric lenses are alternately arranged with the grid lines over the backside surface of the dielectric layer. Apexes of the plurality of convex dielectric lenses are higher than an interface between the upper portion and the lower portion of each of the grid lines.
1. An image sensor device, comprising:
a semiconductor substrate;
a plurality of photo sensitive regions in the semiconductor substrate;
a dielectric layer over a backside surface of the semiconductor substrate facing away from the plurality of photo sensitive regions;
a grid structure over a backside surface of the dielectric layer facing away from the semiconductor substrate, the grid structure comprising a plurality of grid lines, wherein each of the plurality of grid lines comprises a lower portion and an upper portion forming an interface with the lower portion; and
a plurality of convex dielectric lenses alternately arranged with the plurality of grid lines of the grid structure over the backside surface of the dielectric layer, wherein apexes of the plurality of convex dielectric lenses are higher than the interface between the upper portion and the lower portion of each of the plurality of grid lines, wherein the lower portion of each of the plurality of grid lines has a refractive index greater than a refractive index of each of the plurality of convex dielectric lenses.
2. The image sensor device of claim 1 , wherein the lower portion of each of the plurality of grid lines has a refractive index less than a refractive index of the dielectric layer.
3. The image sensor device of claim 1 , wherein the dielectric layer has a refractive index greater than the refractive index of each of the plurality of convex dielectric lenses.
4. The image sensor device of claim 1 , wherein the upper portion of each of the plurality of grid lines has a height greater than a height of the lower portion of each of the plurality of grid lines.
5. The image sensor device of claim 1 , wherein the lower portion of each of the plurality of grid lines has a height less than a height of each of the convex dielectric lenses.
6. The image sensor device of claim 1 , wherein each of the plurality of convex dielectric lenses has opposite edges respectively in contact with two of the plurality of grid lines.
7. The image sensor device of claim 1 , further comprising:
a dielectric structure interfacing the apexes of the plurality of convex dielectric lenses.
8. The image sensor device of claim 7 , wherein the dielectric structure has a refractive index less than the refractive index of each of the plurality of convex dielectric lenses.
9. The image sensor device of claim 1 , wherein in a cross-sectional view, one of the convex dielectric lenses has an arc terminating at a sidewall of the lower portion of one of the plurality of grid lines.
10. The image sensor device of claim 9 , wherein the arc of the one of the convex dielectric lenses terminates at a bottom of the sidewall of the lower portion of one of the plurality of grid lines.
11. An image sensor device, comprising:
a semiconductor substrate;
a plurality of photo sensitive regions in the semiconductor substrate;
a first dielectric layer over a backside surface of the semiconductor substrate facing away from the plurality of photo sensitive regions;
a plurality of convex dielectric lenses over a backside surface of the first dielectric layer facing away from the semiconductor substrate, wherein a refractive index of the first dielectric layer is greater than a refractive index of one of the plurality of convex dielectric lenses; and
a second dielectric layer over the backside surface of the first dielectric layer, the second dielectric layer having a plurality of portions alternately arranged with plurality of convex dielectric lenses, wherein a top position of one of the plurality of portions of the second dielectric layer is lower than a top position of one of the plurality of convex dielectric lenses.
12. The image sensor device of claim 11 , further comprising:
a grid over the second dielectric layer, wherein the grid has a plurality of grid lines respectively aligned with the plurality of portions of the second dielectric layer.
13. The image sensor device of claim 12 , wherein the grid includes a metal material.
14. The image sensor device of claim 12 , wherein the grid includes a dielectric material.
15. The image sensor device of claim 11 , wherein the refractive index of the first dielectric layer is greater than a refractive index of the second dielectric layer.
16. The image sensor device of claim 11 , wherein in a cross-sectional view, an arc from the plurality of convex dielectric lenses reaches a sidewall of one of the plurality of portions of the second dielectric layer.
17. An image sensor device, comprising:
a semiconductor substrate;
a plurality of photo sensitive regions in the semiconductor substrate;
a layer of a first dielectric material over the semiconductor substrate;
a plurality of convex dielectric lenses over the layer of the first dielectric material;
a lower grid structure over the layer of the first dielectric material, the lower grid structure having a height smaller than a height of the plurality of convex dielectric lenses;
an upper grid structure over the lower grid structure and formed of a material different than a material of the lower grid structure, wherein the upper grid structure has a height larger than the height of the lower grid structure; and
a dielectric structure interfacing the plurality of convex dielectric lenses, the lower grid structure, and the upper grid structure, wherein the dielectric structure has a refractive index less than a refractive index of one of the plurality of convex dielectric lenses.
18. The image sensor device of claim 17 , wherein a topmost position of one of the plurality of convex dielectric lenses is higher than an interface between the lower grid structure and the upper grid structure.
19. The image sensor device of claim 17 , further comprising:
a plurality of color filters over the dielectric structure; and
a plurality of micro-lenses over the plurality of color filters, respectively.
20. The image sensor device of claim 17 , wherein in a cross-sectional view, an arc from the plurality of convex dielectric lenses is in contact with a sidewall of the lower grid structure.