Transfer system
A transfer system includes a ceiling carrier, a ceiling storage shelf, and a purging device. The ceiling carrier transfers a foup along a running rail. The ceiling storage shelf is provided along the running rail. The ceiling storage shelf stores the foup transferred by the ceiling carrier. The purging device purges the foup stored in the ceiling storage shelf. The ceiling storage shelf includes placement portions and for placing the foup thereon. The placement portions and can be moved with respect to a storage shelf body of the ceiling storage shelf by a driving gas supplied to the purging device.
1. A transfer system comprising:
a carrier transferring a container along a transfer path;
a storage shelf provided along the transfer path and storing the container transferred by the carrier; and
a purging device purging the container stored in the storage shelf,
wherein the storage shelf includes a placement portion for placing the container thereon, and
the placement portion can be moved with respect to a main body portion of the storage shelf by a gas supplied to the purging device.
2. The transfer system according to claim 1 , wherein the placement portion can be moved up and down with respect to the main body portion of the storage shelf by the gas supplied to the purging device.
3. The transfer system according to claim 1 , wherein the placement portion can be horizontally moved with respect to the main body portion of the storage shelf by the gas supplied to the purging device.
4. The transfer system according to claim 1 , wherein the gas supplied to the purging device includes a purging gas for purging the container, and a flow rate controlling gas for adjusting a flow rate of the purging gas, and
the placement portion can be moved with respect to the main body portion of the storage shelf by the purging gas.
5. The transfer system according to claim 1 , wherein the gas supplied to the purging device includes a purging gas for purging the container, and a flow rate controlling gas for adjusting a flow rate of the purging gas, and
the placement portion can be moved with respect to the main body portion of the storage shelf by the flow rate controlling gas.
6. The transfer system according to claim 1 , comprising:
a drive mechanism for moving the placement portion with respect to the main body portion of the storage shelf,
wherein the placement portion can be moved with respect to the main body portion of the storage shelf, when the gas supplied to the purging device is started to be supplied to the drive mechanism by the carrier.
7. The transfer system according to claim 2 , wherein the placement portion can be horizontally moved with respect to the main body portion of the storage shelf by the gas supplied to the purging device.