Substrate transferring apparatus
A substrate transferring apparatus capable of reducing a nitrogen gas for purging and a shutdown time thereof. The Substrate transferring apparatus includes a ventilation driving room, a FOUP receiving room, a driving equipment room and a ventilation duct. The ventilation driving room is equipped with a main fan for blowing air downward. The FOUP receiving room is disposed under the ventilation driving room and accommodates a FOUP for storing a substrate. The driving equipment room is disposed under the FOUP receiving room. The ventilation duct connects the FOUP receiving room and the ventilation driving room.
1. A substrate transferring apparatus comprising:
a ventilation driving room equipped with a main fan for blowing air downward;
a FOUP receiving room disposed under the ventilation driving room and accommodating a FOUP for storing a substrate;
a driving equipment room disposed under the FOUP receiving room;
an exhausting path disposed adjacent to the driving equipment room on a first side of the FOUP receiving room;
a door that opens a second side of the FOUP receiving room by descending and closes the one side of the FOUP receiving room by ascending:
a door receiving room disposed adjacent to the driving equipment room under the side of the FOUP receiving room, such that the driving equipment room is disposed between the door receiving room and the exhausting path;
a connecting path connecting the door receiving room and the exhausting path across the driving equipment room; and
a ventilation duct connecting the FOUP receiving room and the ventilation driving room, wherein
the FOUP receiving room comprises a first opening portion formed at a lower portion thereof,
the ventilation driving room comprises a second opening portion formed at an upper portion thereof,
the ventilation duct connects the first opening portion and the second opening portion,
a sub fan is disposed in the first opening portion adjacent the exhausting path and the FOUP receiving room, with the sub fan being configured to direct airflow to the ventilation duct, and
the driving equipment room requires no ventilation and is excluded from ventilation space.
2. The substrate transferring apparatus of claim 1 , further comprising:
a sub valve provided in the connecting path to open and close the connecting path; and
a main valve for discharging the gas in the exhausting path to outside.