Granted Patent B2

US 12,295,146 · App. 17/416,618 · Granted May 6, 2025

Inventor: Jea Gun Park (Seongnam-si, KR)

Assignee: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)

H10B63/20H10B61/10

Abstract

Claims (19)

1. A selection device, comprising:

a first electrode;

a second electrode disposed to face the first electrode;

a selector layer comprising at least three first selector layers and at least two second selector layers disposed between the first electrode and the second electrode and comprising a metal concentration profile; and

a diffusion barrier to prevent diffusion of a metal doped in the selector layer,

wherein the metal concentration profile comprises a metal concentration of a metal doped in the at least three first selector layers higher than a metal concentration of a metal doped in the at least two second selector layer,

wherein the diffusion barrier layer is disposed between the second electrode and the one of the at least three first selector layers, and is disposed between the one of the at least three first selector layers and the one of the at least two second selector layers, to separate the one of the at least three first selector layers from the one of the at least two second selector layers, and controls changes in the metal concentration profile that may occur during diffusion of the metal and maintains the metal concentration profile constant,

wherein the metal concentration for one of the at least three first selector layer adjacent to the first electrode is different from the one of the at least three first selector layer disposed between the first electrode and the second electrode, and

wherein the metal concentration for one of the at least two second selector layer adjacent to the first electrode is different from the one of the at least two second selector layer adjacent to the second electrode.

2. The selection device according to claim 1 , wherein the metal concentration profile is controlled by adjusting a thickness of the diffusion barrier layer.

3. The selection device according to claim 1 , wherein materials forming the first and second electrodes comprise at least one selected from platinum (Pt), tungsten (W), titanium nitride (TiN), tantalum nitride (TaN), gold (Au), rubidium (Ru), iridium (Ir), palladium (Pd), titanium (Ti), hafnium (Hf), molybdenum (Mo), and niobium (Nb).

4. The selection device according to claim 1 , wherein a material forming the selector layer comprises at least one selected from chalcogenide materials comprising germanium sulfide (GeS), germanium selenide (GeSe), germanium telluride (GeTe), silicon sulfide (SiS), silicon selenide (SiSe), silicon telluride (SiTe), zinc sulfide (ZnS), zinc selenide (ZnSe), zinc telluride (ZnTe), antimony sulfide (SbS), antimony selenide (SbSe), and antimony telluride (SbTe); and binary oxide materials comprising aluminum oxide (Al 2 O 3 ), magnesium oxide (MgO), chromium oxide (Cr 2 O 3 ), manganese oxide (MnO 2 ), iron oxide (Fe 2 O 3 ), cobalt oxide (Co 3 O 4 ), nickel oxide (NiO), cerium oxide (CeO 2 ), zirconium oxide (ZrO 2 ), silicon oxide (SiO 2 ), copper oxide (CuO), tantalum oxide (Ta 2 O 5 ), titanium oxide (TiO 2 ), zinc oxide (ZnO), hafnium oxide (HfO 2 ), molybdenum oxide (MoO 2 ), indium oxide (In 2 O 3 ), tin oxide (SnO 2 ), and tungsten oxide (W 2 O 3 ).

5. The selection device according to claim 1 , wherein the metal doped in the at least three first selector layers and the at least two second selector layers comprises at least one selected from silver (Ag), copper (Cu), nickel (Ni), and titanium (Ti).

6. The selection device according to claim 1 , wherein the diffusion barrier layer is formed of at least one selected from titanium nitride (TiN), tantalum nitride (TaN), tungsten nitride (WN), silicon nitride (SiN), aluminum nitride (AIN), and hafnium nitride (HfN).

7. A memory device, comprising:

first wires and second wires arranged to cross each other;

memory layers disposed at intersections of the first wires and the second wires; and

selection devices according to claim 1 disposed between the memory layers and the first wires or between the memory layers and the second wires.

8. The memory device according to claim 7 , wherein the memory device is phase-change RAM (PCRAM), resistive RAM (RRAM), or magnetic RAM.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (16)