Gas cylinder automation system
A gas cylinder automation system may include: a transfer path automatically supply gas in a gas cylinder brought into the gas cylinder automation system to a semiconductor process line; and a cylinder-type sensor checking whether the transfer path is abnormal by moving along the transfer path, wherein the cylinder-type sensor includes: a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and having a first detecting sensor disposed on the end cap fastening member to detect one of a force or torque applied to the end cap and a cylinder body connected to the cylinder head and having a second detecting sensor including at least one of an acceleration sensor or an inclination sensor mounted thereon.
1. A gas cylinder automation system comprising:
a gas cylinder delivery system including a plurality of mobile robots configured to automatically supply gas cylinders along a transfer path from one of a gas cylinder storage queue or gas storage cabinet of the gas cylinder automation system to a semiconductor process line; and
a cylinder-type sensor configured to check whether the transfer path is abnormal by moving along the transfer path by one of the plurality of mobile robots,
wherein the cylinder-type sensor includes:
a cylinder head including an end cap fastening member and an end cap coupled to the end cap fastening member and the cylinder head having a first detecting sensor on the end cap fastening member, the first detecting sensor being configured to detect a torque applied to the end cap; and
a cylinder body connected to the cylinder head and having a second detecting sensor on the cylinder body, the second detecting sensor including one of an acceleration sensor or an inclination sensor.
2. The gas cylinder automation system of claim 1 , wherein the one of the plurality of mobile robots carrying the cylinder-type sensor is controlled to move to each module inside the gas cylinder automation system.
3. The gas cylinder automation system of claim 2 , wherein a force or torque applied to a gas cylinder moving to each module inside the gas cylinder automation system is measured based on a detection result of the first detecting sensor.
4. The gas cylinder automation system of claim 2 , wherein whether each module inside the transfer path is abnormal is detected based on detection results of the first detecting sensor.
5. The gas cylinder automation system of claim 1 , wherein the second detecting sensor includes an acceleration sensor configured to detect vibrations applied to the cylinder-type sensor.
6. The gas cylinder automation system of claim 1 , wherein the second detecting sensor includes an inclination sensor configured to sense an inclination of the cylinder-type sensor.
7. The gas cylinder automation system of claim 1 , wherein the cylinder head includes a housing and a mounting member on the housing, and the first detecting sensor is between the housing and the mounting member.
8. The gas cylinder automation system of claim 1 , wherein the cylinder body includes a wireless communication module configured to wirelessly transmit a detection result of the first detecting sensor and the second detecting sensor.
9. The gas cylinder automation system of claim 8 , wherein the cylinder-type sensor further includes a battery connected to the wireless communication module.
10. The gas cylinder automation system of claim 1 , wherein the cylinder-type sensor further includes a battery connected to the second detecting sensor.