Hybrid base plate
The present invention relates to a hybrid base plate and a manufacturing method therefor. Metal sheets of different materials having excellent thermal conductivity can be joined to have a thickness favorable for heat dissipation, and by arranging a metal sheet of a material with a low coefficient of thermal expansion between metal sheets with a high coefficient of thermal expansion, there is an effect of preventing warpage when manufacturing a large-area heat sink.
1. A hybrid base plate comprising:
a first metal sheet having a three-layer bonded metal sheet structure in which a metal sheet made of CuMo is bonded to a top surface of a metal sheet made of Mo and a metal sheet made of CuW is bonded to a bottom surface of the metal sheet made of Mo;
a second metal sheet made of Cu material and brazing-bonded to a top surface of the first metal sheet; and
a third metal sheet made of Cu material and brazing-bonded to a bottom surface of the first metal sheet.
2. The hybrid base plate of claim 1 , further comprising brazing filler layers disposed respectively between the first metal sheet and the second metal sheet and between the first metal sheet and the third metal sheet, wherein the second and third metal sheets are brazing-bonded to the first metal sheet through the brazing filler layers.
3. The hybrid base plate of claim 2 , wherein each of the brazing filler layers includes an Ag layer formed on each of top and bottom surfaces of the first metal sheet and a Cu layer formed on each of the Ag layers.
4. The hybrid base plate of claim 2 , further comprising seed layers disposed between each of the brazing filler layers and each surface of the first metal sheet, wherein the second and third metal sheets are brazing-bonded to the first metal sheet through the brazing filler layers and the seed layers.
5. The hybrid base plate of claim 4 , wherein the seed layer includes a Ti layer formed on each of the top and bottom surfaces of the first metal sheet, and a Cu layer formed on each of the Ti layers.