Semiconductor gas pipe fitting fastener
A semiconductor gas pipe fitting fastener is disclosed. The semiconductor gas pipe fitting fastener of the present disclosure includes: a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows; a male fitting member connected with the female fitting member by being connected to a second pipe opposite to the first pipe; a female nut member supporting the female fitting member therein; a male nut member supporting the male fitting member therein and configured to connect the female fitting member and the male fitting member by being coupled to the female nut member; and a gasket member supported on a side by the female fitting member, supported on another side by the male fitting member, and configured to prevent leakage of gas from the female fitting member and the male fitting member.
1. A semiconductor gas pipe fitting fastener comprising:
a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows;
a male fitting member connected with the female fitting member by being connected to a second pipe opposite to the first pipe;
a female nut member supporting the female fitting member therein;
a male nut member supporting the male fitting member therein and configured to connect the female fitting member and the male fitting member by being coupled to the female nut member; and
a gasket member supported on a side by the female fitting member, supported on another side by the male fitting member, and configured to prevent leakage of gas from the female fitting member and the male fitting member,
wherein the gasket member includes a protrusion of which a side is exposed outside the female nut member,
a gasket indicator is disposed at the protrusion such that the exposed region of the protrusion is shown, and the gasket indicator is shown to correspond to a material of the gasket member,
a gasket slot in which the gasket member is inserted is formed at the female nut member,
a first indicator and a second indicator are disposed in a region of the female nut member in which the gasket slot is formed, and
the first indicator and the second indicator are shown in different colors, whereby a fastening state of the female nut member is shown.
2. The semiconductor gas pipe fitting fastener of claim 1 , wherein the gasket member includes:
a gasket body having a gasket hole connected with the female fitting member and the male fitting member;
a protrusion formed at the gasket body and having an end exposed outside the gasket slot; and
the gasket indicator disposed at the protrusion.
3. The semiconductor gas pipe fitting fastener of claim 1 , wherein the female nut member includes:
a female nut body having the gasket slot;
the first indicator disposed on a side of the female nut body on which the gasket slot is formed; and
a second indicator disposed on another side of the female nut body on which the gasket slot is formed, and colored with a different color from the first indicator, and
the semiconductor gas pipe fitting fastener shows a state before the female nut member and the male nut member are locked when the protrusion is positioned in the first indicator, and shows a state in which the female nut member and the male nut member have been fastened when the protrusion is positioned in the second indicator.