ReRAM module with intermediate electrode
A resistive RAM module comprises a source electrode and an intermediate electrode that is formed on the source electrode. The intermediate electrode has a closed-curve profile. The resistive RAM module also comprises a memristor element that is deposited on the intermediate electrode. The resistive RAM module also comprises a sink electrode that is in contact with the memristor element. The intermediate electrode is electrically between the source electrode and the memristor element and the memristor element is electrically between the intermediate electrode and the sink electrode.
1. A resistive RAM module comprising:
a source electrode;
an intermediate electrode that is formed on the source electrode;
a memristor element that is deposited on the intermediate electrode such that the intermediate electrode is electrically between the source electrode and the memristor element; and
a sink electrode that is in contact with the memristor element such that the memristor element is electrically between the intermediate electrode and the sink electrode;
wherein the intermediate electrode and the memristor element have a closed-curve profile with at least one point.
2. The resistive RAM module of claim 1 , wherein the closed-curve profile is a concave closed-curve profile.
3. The resistive RAM module of claim 2 , wherein the sink electrode forms a negative pattern of the concave closed-curve profile.
4. The resistive RAM module of claim 2 , wherein the concave closed-curve profile has four points.
5. The resistive RAM module of claim 1 , further comprising a nitride cap that is formed on the intermediate electrode and the memristor element.