Storage container storing treatment liquid for manufacturing semiconductor
A storage container storing a treatment liquid for manufacturing a semiconductor. The treatment liquid for manufacturing a semiconductor includes: one compound (A) that satisfies the requirement (a); one compound (B) or two or more compounds (B) that satisfy the requirement (b); and one inorganic matter (C) or two or more inorganic matters (C) having any element selected from the group consisting of Al, B, S, N, and K. Here, a total content of the compound (B) in the treatment liquid is 10 −10 to 0.1 mass %, and a ratio P of the inorganic matter (C) to the compound (B) is 10 3 to 10 −6 .
1. A storage container storing a treatment liquid for manufacturing a semiconductor, the treatment liquid for manufacturing a semiconductor comprising:
one compound (A) that satisfies the following requirement (a);
one compound (B) or two or more compounds (B) that satisfy the following requirement (b); and
one inorganic matter (C) or two or more inorganic matters (C) having any element selected from the group consisting of Al, B, S, N, and K,
wherein a total content of the compound (B) in the treatment liquid is 10 −10 to 0.1 mass %,
a ratio P of the inorganic matter (C) to the compound (B) represented by the following Expression I is 10 3 to 10 −6 ,
the requirement (a): a compound that is selected from the group consisting of a first alcohol compound, a first ketone compound, and a first ester compound and of which a content in the treatment liquid is 90.0 to 99.9999999 mass %,
the requirement (b): a compound that is selected from the group consisting of a second alcohol compound having 6 or more carbon atoms, a second ketone compound, a second ester compound, an ether compound, and an aldehyde compound, wherein the second ester compound is:
and of which a content in the treatment liquid is 10 −11 to 0.1 mass %, and when the treatment liquid contains only one type of compound (B), a content of the compound (B) is 10 −10 % by mass or more, and
P =[Total Mass of Inorganic Matter( C )]/[Total Mass of Compound( B )] Expression I,
wherein the first alcohol compound is different from the second alcohol compound, the first ketone compound is different from the second ketone compound, and the first ester compound is different from the second ester compound.
2. The storage container according to claim 1 , comprising
a liquid contact portion in contact with the treatment liquid for manufacturing a semiconductor, wherein
the liquid contact portion is formed of a fluororesin, and
the liquid contact portion is a portion from an inner surface of the storage container to a depth of 100 nm from the inner surface of the storage container.
3. The storage container according to claim 1 , comprising
a liquid contact portion in contact with the treatment liquid for manufacturing a semiconductor, wherein
the liquid contact portion is formed of stainless steel, and
the liquid contact portion is a portion from an inner surface of the storage container to a depth of 100 nm from the inner surface of the storage container.
4. The storage container according to claim 3 ,
wherein a mass ratio Cr/Fe of a Cr content to an Fe content in the stainless steel forming the liquid contact portion is higher than 0.5 and lower than 3.5.